Inventor
YAMAGA KENICHI
JP38 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGA KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
22 patentsUS5578132ANov 26, 1996
Apparatus for heat treating semiconductors at normal pressure and low pressure
TOKYO ELECTRON LTD156 citations99
US6390754B2May 21, 2002
Wafer processing apparatus, method of operating the same and wafer detecting system
TOKYO ELECTRON LTD467 citations98
US6369361B2Apr 9, 2002
Thermal processing apparatus
TOKYO ELECTRON LTD98 citations98
US5616264AApr 1, 1997
Method and apparatus for controlling temperature in rapid heat treatment system
TOKYO ELECTRON LTD565 citations98
US5484484AJan 16, 1996
Thermal processing method and apparatus therefor
TOKYO ELECTRON LTD513 citations98
US5750436AMay 12, 1998
Thermal processing method and apparatus therefor
TOKYO ELECTRON LTD61 citations96
US5829969ANov 3, 1998
Vertical heat treating apparatus
TOKYO ELECTRON LTD34 citations92
US5533736AJul 9, 1996
Thermal processing apparatus
TOKYO ELECTRON LTD29 citations92
US5219464AJun 15, 1993
Clean air apparatus
TOKYO ELECTRON LTD37 citations92
US8023806B2Sep 20, 2011
Heat processing furnace and vertical-type heat processing apparatus
TOKYO ELECTRON LTD7 citations84
US7888622B2Feb 15, 2011
Heat-processing furnace and manufacturing method thereof
TOKYO ELECTRON LTD8 citations84
US7311520B2Dec 25, 2007
Heat treatment apparatus
TOKYO ELECTRON LTD17 citations84
US7102104B2Sep 5, 2006
Heat treatment system
TOKYO ELECTRON LTD14 citations84
US5362229ANov 8, 1994
Piping connection device
TOKYO ELECTRON LTD19 citations74
US9790597B2Oct 17, 2017
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD3 citations73
US7974525B2Jul 5, 2011
Heat processing furnace and vertical-type heat processing apparatus
TOKYO ELECTRON LTD5 citations63
US7528347B2May 5, 2009
Cooling device and heat treating device using the same
TOKYO ELECTRON LTD3 citations63
US7150628B2Dec 19, 2006
Single-wafer type heat treatment apparatus for semiconductor processing system
TOKYO ELECTRON LTD5 citations63
US7479619B2Jan 20, 2009
Thermal processing unit
TOKYO ELECTRON LTD4 citations62
US7144823B2Dec 5, 2006
Thermal treatment apparatus
TOKYO ELECTRON LTD2 citations62
US9829145B2Nov 28, 2017
Manufacturing method of heat insulation wall body and heat insulation wall body
TOKYO ELECTRON LTD0 citations52
USD604257SNov 17, 2009
Heater for semiconductor manufacturing
TOKYO ELECTRON LTD1 citations46
TEL SAGAMI LTD
8 patentsUS5181819AJan 26, 1993
Apparatus for processing semiconductors
TEL SAGAMI LTD63 citations96
US5007788AApr 16, 1991
Pitch changing device for changing pitches of plate-like objects and method of changing pitches
TEL SAGAMI LTD74 citations96
US5261935ANov 16, 1993
Clean air apparatus
TEL SAGAMI LTD112 citations95
US5131799AJul 21, 1992
Semiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor wafer
TEL SAGAMI LTD32 citations92
US5030057AJul 9, 1991
Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer
TEL SAGAMI LTD41 citations90
US5221201AJun 22, 1993
Vertical heat treatment apparatus
TEL SAGAMI LTD52 citations89
US5088922AFeb 18, 1992
Heat-treatment apparatus having exhaust system
TEL SAGAMI LTD25 citations86
US4954079ASep 4, 1990
Heat-treating apparatus and a method for the same
TEL SAGAMI LTD12 citations74
KOBAYASHI MAKOTO
3 patentsUS8476560B2Jul 2, 2013
Thermal processing furnace
KOBAYASHI MAKOTO9 citations84
US9466515B2Oct 11, 2016
Heat treatment furnace and heat treatment apparatus
KOBAYASHI MAKOTO2 citations60
US8253075B2Aug 28, 2012
Heat treatment apparatus, heater, and method for manufacturing the heater
KOBAYASHI MAKOTO1 citations52
YAMAGA KENICHI
2 patentsUS8080767B2Dec 20, 2011
Thermal processing apparatus and thermal processing method for object to be processed
YAMAGA KENICHI9 citations82
US8089031B2Jan 3, 2012
Heating apparatus for heating objects to be heated, heating method for heating the objects to be heated, and storage medium in which computer-readable program is stored
YAMAGA KENICHI4 citations60