Inventor
ARASE TAKAO
JP22 patents
⚠️ This page may combine multiple inventors who share the name “ARASE TAKAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
19 patentsUS7364956B2Apr 29, 2008
Method for manufacturing semiconductor devices
HITACHI HIGH TECH CORP163 citations98
USD871609SDec 31, 2019
Electrode plate peripheral ring for a plasma processing apparatus
HITACHI HIGH TECH CORP41 citations93
USD868993SDec 3, 2019
Electrode plate for a plasma processing apparatus
HITACHI HIGH TECH CORP36 citations93
USD870314SDec 17, 2019
Electrode cover for a plasma processing apparatus
HITACHI HIGH TECH CORP34 citations92
USD891636SJul 28, 2020
Ring for a plasma processing apparatus
HITACHI HIGH TECH CORP6 citations83
US8038896B2Oct 18, 2011
Plasma processing method and apparatus
HITACHI HIGH TECH CORP12 citations83
US10665448B2May 26, 2020
Plasma processing apparatus
HITACHI HIGH TECH CORP2 citations73
US10157750B2Dec 18, 2018
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP2 citations70
US11257678B2Feb 22, 2022
Plasma processing method
HITACHI HIGH TECH CORP2 citations66
US9136095B2Sep 15, 2015
Method for controlling plasma processing apparatus
HITACHI HIGH TECH CORP3 citations63
US10332760B2Jun 25, 2019
Method for controlling plasma processing apparatus
HITACHI HIGH TECH CORP1 citations62
US11532484B2Dec 20, 2022
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations60
US11961719B2Apr 16, 2024
Vacuum processing method
HITACHI HIGH TECH CORP0 citations52
US11355322B2Jun 7, 2022
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations52
US10056236B2Aug 21, 2018
Plasma processing method
HITACHI HIGH TECH CORP0 citations51
US9230782B2Jan 5, 2016
Plasma processing method and apparatus
HITACHI HIGH TECH CORP1 citations51
US9887070B2Feb 6, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations48
US9779919B2Oct 3, 2017
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations48
US9905431B2Feb 27, 2018
Dry etching method
HITACHI HIGH TECH CORP0 citations44