Inventor
CHANG ANZHONG
US31 patents
⚠️ This page may combine multiple inventors who share the name “CHANG ANZHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
24 patentsUS8361892B2Jan 29, 2013
Multiple precursor showerhead with by-pass ports
APPLIED MATERIALS INC125 citations98
US6660126B2Dec 9, 2003
Lid assembly for a processing system to facilitate sequential deposition techniques
APPLIED MATERIALS INC128 citations98
US6461435B1Oct 8, 2002
Showerhead with reduced contact area
APPLIED MATERIALS INC600 citations98
US6734020B2May 11, 2004
Valve control system for atomic layer deposition chamber
APPLIED MATERIALS INC135 citations97
US6494955B1Dec 17, 2002
Ceramic substrate support
APPLIED MATERIALS INC82 citations96
US6596085B1Jul 22, 2003
Methods and apparatus for improved vaporization of deposition material in a substrate processing system
APPLIED MATERIALS INC71 citations95
US8679956B2Mar 25, 2014
Multiple precursor showerhead with by-pass ports
APPLIED MATERIALS INC23 citations92
US7214297B2May 8, 2007
Substrate support element for an electrochemical plating cell
APPLIED MATERIALS INC30 citations92
US6299692B1Oct 9, 2001
Head for vaporizing and flowing various precursor materials onto semiconductor wafers during chemical vapor deposition
APPLIED MATERIALS INC29 citations92
US9845550B2Dec 19, 2017
Upper dome with injection assembly
APPLIED MATERIALS INC7 citations84
US9322097B2Apr 26, 2016
EPI base ring
APPLIED MATERIALS INC7 citations84
USD716240SOct 28, 2014
Lower chamber liner
APPLIED MATERIALS INC16 citations84
USD711331SAug 19, 2014
Upper chamber liner
APPLIED MATERIALS INC15 citations84
US10930543B2Feb 23, 2021
Thermal processing susceptor
APPLIED MATERIALS INC4 citations83
US10062598B2Aug 28, 2018
Thermal processing susceptor
APPLIED MATERIALS INC7 citations83
US10727093B2Jul 28, 2020
Light pipe window structure for low pressure thermal processes
APPLIED MATERIALS INC3 citations73
US10119192B2Nov 6, 2018
EPI base ring
APPLIED MATERIALS INC3 citations73
US10269614B2Apr 23, 2019
Susceptor design to reduce edge thermal peak
APPLIED MATERIALS INC3 citations72
US9768043B2Sep 19, 2017
Quartz upper and lower domes
APPLIED MATERIALS INC4 citations72
US11495479B2Nov 8, 2022
Light pipe window structure for thermal chamber applications and processes
APPLIED MATERIALS INC0 citations63
US12400904B2Aug 26, 2025
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US11848226B2Dec 19, 2023
Thermal processing susceptor
APPLIED MATERIALS INC0 citations62
US10458040B2Oct 29, 2019
Upper dome with injection assembly
APPLIED MATERIALS INC1 citations62
US10410890B2Sep 10, 2019
Light pipe window structure for thermal chamber applications and processes
APPLIED MATERIALS INC0 citations52