P

Inventor

GE ZHENBIN

US30 patents
⚠️ This page may combine multiple inventors who share the name “GE ZHENBIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

19 patents
US10400335B2Sep 3, 2019

Dual-direction chemical delivery system for ALD/CVD chambers

APPLIED MATERIALS INC363 citations99
US9765432B2Sep 19, 2017

Dual-direction chemical delivery system for ALD/CVD chambers

APPLIED MATERIALS INC362 citations99
US9353440B2May 31, 2016

Dual-direction chemical delivery system for ALD/CVD chambers

APPLIED MATERIALS INC373 citations99
USD825505SAug 14, 2018

Target profile for a physical vapor deposition chamber target

APPLIED MATERIALS INC318 citations98
USD798248SSep 26, 2017

Target profile for a physical vapor deposition chamber target

APPLIED MATERIALS INC309 citations98
US7939422B2May 10, 2011

Methods of thin film process

APPLIED MATERIALS INC240 citations98
US7994002B2Aug 9, 2011

Method and apparatus for trench and via profile modification

APPLIED MATERIALS INC7 citations84
US10763090B2Sep 1, 2020

High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process

APPLIED MATERIALS INC3 citations73
US10099245B2Oct 16, 2018

Process kit for deposition and etching

APPLIED MATERIALS INC2 citations73
US9472443B2Oct 18, 2016

Selectively groundable cover ring for substrate process chambers

APPLIED MATERIALS INC4 citations73
US11162170B2Nov 2, 2021

Methods for reducing material overhang in a feature of a substrate

APPLIED MATERIALS INC2 citations69
US8865012B2Oct 21, 2014

Methods for processing a substrate using a selectively grounded and movable process kit ring

APPLIED MATERIALS INC2 citations62
US10242873B2Mar 26, 2019

RF power compensation to control film stress, density, resistivity, and/or uniformity through target life

APPLIED MATERIALS INC0 citations52
US9028659B2May 12, 2015

Magnetron design for extended target life in radio frequency (RF) plasmas

APPLIED MATERIALS INC1 citations52
US8043933B2Oct 25, 2011

Integration sequences with top surface profile modification

APPLIED MATERIALS INC1 citations52
US9593410B2Mar 14, 2017

Methods and apparatus for stable substrate processing with multiple RF power supplies

APPLIED MATERIALS INC1 citations51
US10400327B2Sep 3, 2019

Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor

APPLIED MATERIALS INC0 citations41
US10266940B2Apr 23, 2019

Auto capacitance tuner current compensation to control one or more film properties through target life

APPLIED MATERIALS INC0 citations41
US9611539B2Apr 4, 2017

Crystalline orientation and overhang control in collision based RF plasmas

APPLIED MATERIALS INC0 citations41

APPLE INC

8 patents

CHANG MEI

1 patent

LU XINLIANG

1 patent

GE ZHENBIN

1 patent