Inventor
WATANABE KATSUHIDE
JP50 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE KATSUHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
42 patentsUSD633452SMar 1, 2011
Elastic membrane for semiconductor wafer polishing apparatus
EBARA CORP342 citations99
US5765800AJun 16, 1998
Vibration damping apparatus
EBARA CORP98 citations97
US5904608AMay 18, 1999
Polishing apparatus having interlock function
EBARA CORP56 citations96
US5876012AMar 2, 1999
Vibration cancellation apparatus
EBARA CORP59 citations95
US5397212AMar 14, 1995
Robot with dust-free and maintenance-free actuators
EBARA CORP88 citations94
US5142175AAug 25, 1992
Magnetic bearing system
EBARA CORP40 citations93
US5951368ASep 14, 1999
Polishing apparatus
EBARA CORP34 citations92
US5471802ADec 5, 1995
Electromagnetically suspended floating floor apparatus
EBARA CORP20 citations92
US5449985ASep 12, 1995
Zero-power control type vibration eliminating apparatus
EBARA CORP21 citations92
US6515388B1Feb 4, 2003
Magnetic levitation control apparatus
EBARA CORP24 citations91
US6042454AMar 28, 2000
System for detecting the endpoint of the polishing of a semiconductor wafer by a semiconductor wafer polisher
EBARA CORP28 citations91
US5720010AFeb 17, 1998
Control system for a linear actuator including magnetic bearings for levitating a robot arm
EBARA CORP30 citations91
US5793598AAug 11, 1998
Magnetically levitated vibration damping apparatus
EBARA CORP27 citations90
US6437864B1Aug 20, 2002
Stage positioning device
EBARA CORP36 citations89
US5385217AJan 31, 1995
Vibration eliminating apparatus for elminating vibration of an installation floor
EBARA CORP35 citations89
US11450544B2Sep 20, 2022
Substrate processing apparatus, substrate processing system, and substrate processing method
EBARA CORP8 citations86
US10665487B2May 26, 2020
Substrate processing apparatus, substrate processing system, and substrate processing method
EBARA CORP8 citations84
USD729753SMay 19, 2015
Elastic membrane for semiconductor wafer polishing
EBARA CORP7 citations84
US8859070B2Oct 14, 2014
Elastic membrane
EBARA CORP16 citations84
US9156130B2Oct 13, 2015
Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus
EBARA CORP11 citations83
US9108292B2Aug 18, 2015
Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus
EBARA CORP19 citations83
US8382558B2Feb 26, 2013
Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method
EBARA CORP14 citations83
US4910449AMar 20, 1990
System for preventing unbalance vibrations and synchronous disturbance vibrations
EBARA CORP17 citations74
US10056277B2Aug 21, 2018
Polishing method
EBARA CORP2 citations73
US9999955B2Jun 19, 2018
Polishing apparatus and polished-state monitoring method
EBARA CORP4 citations73
US6183342B1Feb 6, 2001
Polishing apparatus
EBARA CORP10 citations73
US8951813B2Feb 10, 2015
Method of polishing a substrate having a film on a surface of the substrate for semiconductor manufacturing
EBARA CORP5 citations72
US9073170B2Jul 7, 2015
Polishing apparatus having thermal energy measuring means
EBARA CORP2 citations63
US5814814ASep 29, 1998
Electron microscope
EBARA CORP6 citations63
US12062563B2Aug 13, 2024
Substrate processing apparatus, substrate processing system, and substrate processing method
EBARA CORP0 citations62
US12036634B2Jul 16, 2024
Substrate processing control system, substrate processing control method, and program
EBARA CORP1 citations62
US6536735B2Mar 25, 2003
Vibration isolating apparatus for table for mounting device sensitive to vibrations and method therefor
EBARA CORP4 citations59
US12076834B2Sep 3, 2024
Eddy current sensor
EBARA CORP0 citations52
US11833636B2Dec 5, 2023
Substrate polishing apparatus, method of creating thickness map, and method of polishing a substrate
EBARA CORP0 citations52
US11673222B2Jun 13, 2023
Polishing head system and polishing apparatus
EBARA CORP0 citations52
US11465254B2Oct 11, 2022
Polishing machine and a polishing method for a substrate
EBARA CORP0 citations52
US9149903B2Oct 6, 2015
Polishing apparatus having substrate holding apparatus
EBARA CORP0 citations52
US12017323B2Jun 25, 2024
Polishing head system and polishing apparatus
EBARA CORP0 citations51
US11759912B2Sep 19, 2023
Magnetic element and eddy current sensor using the same
EBARA CORP0 citations51
US10500691B2Dec 10, 2019
Substrate processing apparatus and substrate processing method
EBARA CORP0 citations51
US12179310B2Dec 31, 2024
Output signal processing apparatus for eddy current sensor
EBARA CORP0 citations50
US5760578AJun 2, 1998
Inductive displacement sensor system detecting displacements in two directions using a multi-bridge circuit
EBARA CORP0 citations39