Inventor
LI YICHENG
CN21 patents
⚠️ This page may combine multiple inventors who share the name “LI YICHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS7794546B2Sep 14, 2010
Sealing device and method for a processing system
TOKYO ELECTRON LTD404 citations99
US7740705B2Jun 22, 2010
Exhaust apparatus configured to reduce particle contamination in a deposition system
TOKYO ELECTRON LTD565 citations99
US7670432B2Mar 2, 2010
Exhaust system for a vacuum processing system
TOKYO ELECTRON LTD379 citations99
USD593969SJun 9, 2009
Processing chamber for manufacturing semiconductors
TOKYO ELECTRON LTD541 citations99
US6891131B2May 10, 2005
Thermal processing system
TOKYO ELECTRON LTD25 citations92
US6448536B2Sep 10, 2002
Single-substrate-heat-processing apparatus for semiconductor process
TOKYO ELECTRON LTD32 citations92
US6437290B1Aug 20, 2002
Heat treatment apparatus having a thin light-transmitting window
TOKYO ELECTRON LTD48 citations92
US6845292B2Jan 18, 2005
Transfer apparatus and method for semiconductor process and semiconductor processing system
TOKYO ELECTRON LTD27 citations90
US6641302B2Nov 4, 2003
Thermal process apparatus for a semiconductor substrate
TOKYO ELECTRON LTD13 citations84
USD589472SMar 31, 2009
Processing chamber for manufacturing semiconductors
TOKYO ELECTRON LTD6 citations74
US6889004B2May 3, 2005
Thermal processing system and thermal processing method
TOKYO ELECTRON LTD7 citations74
US7029505B2Apr 18, 2006
Sheet type heat treating apparatus and method for processing semiconductors
TOKYO ELECTRON LTD7 citations69
US6403926B2Jun 11, 2002
Thermal processing apparatus having a coolant passage
TOKYO ELECTRON LTD5 citations63
UNIV JILIN
3 patentsUS12247956B1Mar 11, 2025
Rapid dot matrix micro-nano impact indentation testing system
UNIV JILIN2 citations68
US12247957B1Mar 11, 2025
Pin-on-disk type in-situ current-carrying friction testing system
UNIV JILIN1 citations60
US12436072B1Oct 7, 2025
Micro-nano impact indentation testing device and method based on cyclic refrigeration
UNIV JILIN0 citations45
UNIV JIANGSU
2 patentsUS11862016B1Jan 2, 2024
Multi-intelligence federal reinforcement learning-based vehicle-road cooperative control system and method at complex intersection
UNIV JIANGSU30 citations92
US12307789B2May 20, 2025
Multi-task joint perception network model and detection method for traffic road surface information
UNIV JIANGSU0 citations49