P

Inventor

NAKANISHI MASAYUKI

JP55 patents
⚠️ This page may combine multiple inventors who share the name “NAKANISHI MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

28 patents
US7682225B2Mar 23, 2010

Polishing apparatus and substrate processing apparatus

EBARA CORP46 citations96
US7367873B2May 6, 2008

Substrate processing apparatus

EBARA CORP55 citations94
USD859331SSep 10, 2019

Vacuum contact pad

EBARA CORP11 citations84
US9248545B2Feb 2, 2016

Substrate processing apparatus and substrate processing method

EBARA CORP7 citations84
US7862402B2Jan 4, 2011

Polishing apparatus and substrate processing apparatus

EBARA CORP10 citations84
USD851142SJun 11, 2019

Pressing member for substrate polishing apparatus

EBARA CORP4 citations83
USD851140SJun 11, 2019

Pressing member for substrate polishing apparatus

EBARA CORP6 citations83
USD851141SJun 11, 2019

Pressing member for substrate polishing apparatus

EBARA CORP6 citations83
USD834075SNov 20, 2018

Pressing member for substrate polishing apparatus

EBARA CORP7 citations83
US10639727B2May 5, 2020

Vacuum suction pad and substrate holder

EBARA CORP2 citations73
US10166647B2Jan 1, 2019

Polishing apparatus and polishing method

EBARA CORP2 citations73
US9808903B2Nov 7, 2017

Method of polishing back surface of substrate and substrate processing apparatus

EBARA CORP3 citations73
US9393595B2Jul 19, 2016

Abrasive film fabrication method and abrasive film

EBARA CORP3 citations73
US8748289B2Jun 10, 2014

Method for manufacturing semiconductor device

EBARA CORP5 citations73
US9492910B2Nov 15, 2016

Polishing method

EBARA CORP5 citations72
US9666440B2May 30, 2017

Polishing apparatus and polishing method

EBARA CORP2 citations67
US12544994B2Feb 10, 2026

Substrate processing method

EBARA CORP0 citations63
US9517544B2Dec 13, 2016

Polishing apparatus and polishing method

EBARA CORP2 citations63
US9457448B2Oct 4, 2016

Polishing apparatus and polishing method

EBARA CORP2 citations63
US11865665B2Jan 9, 2024

Polishing apparatus

EBARA CORP1 citations62
US11511386B2Nov 29, 2022

Polishing apparatus and polishing method

EBARA CORP0 citations62
US10926376B2Feb 23, 2021

Method and apparatus for polishing a substrate, and method for processing a substrate

EBARA CORP0 citations62
US10632587B2Apr 28, 2020

Polishing apparatus and polishing method

EBARA CORP1 citations62
US7767472B2Aug 3, 2010

Substrate processing method and substrate processing apparatus

EBARA CORP2 citations62
US10632588B2Apr 28, 2020

Polishing apparatus and pressing pad for pressing polishing tool

EBARA CORP1 citations61
US11331766B2May 17, 2022

Substrate polishing device and polishing method

EBARA CORP0 citations52
US10854473B2Dec 1, 2020

Polishing method, polishing apparatus, and substrate processing system

EBARA CORP0 citations52
US10493588B2Dec 3, 2019

Polishing apparatus and polishing method

EBARA CORP0 citations52

NAKANISHI MASAYUKI

4 patents

JAPAN CAPSULAR PRODUCTS INC

3 patents

SEKI MASAYA

3 patents

AJINOMOTO KK

2 patents

TAKAHASHI TAMAMI

2 patents

TOKYO SHIBAURA ELECTRIC CO

2 patents

MATSUSHITA REFRIGERATION

1 patent

TOSHIBA KK

1 patent

IDEMITSU KOSAN CO

1 patent

DENSO CORP

1 patent

NTT DOCOMO INC

1 patent

NORITSU KOKI CO LTD

1 patent

Showing the top 50 of 55 patents by PatentIndex Score.