Inventor

ALLEN ADOLPH MILLER

US38 patents

⚠️ This page may combine multiple inventors who share the name “ALLEN ADOLPH MILLER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ALLEN ADOLPH MILLER

APPLIED MATERIALS INC

Target profile for a physical vapor deposition chamber target

Methods for pre-cleaning conductive interconnect structures

Target profile for a physical vapor deposition chamber target

Method for plasma ignition

Holding assembly for substrate processing chamber

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process

Process kit having tall deposition ring and deposition ring clamp

Methods and apparatus for processing a substrate

Method for particle removal from wafers through plasma modification in pulsed PVD

Biased cover ring for a substrate processing system

Magnetron assembly for physical vapor deposition chamber

Shield for a substrate processing chamber

Reducing substrate surface scratching using machine learning

Blockchain for distributed authentication of hardware operating profile

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers

Pattern fortification for HDD bit patterned media pattern transfer

Top magnets for decreased non-uniformity in PVD

Method for particle removal from wafers through plasma modification in pulsed PVD

Reducing substrate surface scratching using machine learning

Etch uniformity improvement for single turn internal coil PVD chamber

Methods and apparatus for maintaining low non-uniformity over target life

RF power compensation to control film stress, density, resistivity, and/or uniformity through target life

High density TiN RF/DC PVD deposition with stress tuning

Methods for pre-cleaning conductive materials on a substrate

Pattern fortification for HDD bit patterned media pattern transfer

Method to modulate coverage of barrier and seed layer using titanium nitride

Method and system for balancing the electrostatic chucking force on a substrate

Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor

Auto capacitance tuner current compensation to control one or more film properties through target life

Crystalline orientation and overhang control in collision based RF plasmas

High density, low stress amorphous carbon film, and process and equipment for its deposition

SCHEIBLE KATHLEEN

Process kit and target for substrate processing chamber

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Techniques for forming low stress etch-resistant mask using implantation

ALLEN ADOLPH MILLER

Sputtering target having increased life and sputtering uniformity

GE ZHENBIN

Methods of forming a metal containing layer on a substrate with high uniformity and good profile control