Inventor

KOUZUMA YUTAKA

JP20 patents

⚠️ This page may combine multiple inventors who share the name “KOUZUMA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOUZUMA YUTAKA

HITACHI HIGH TECH CORP

Ion shield plate for semiconductor manufacturing apparatus

Infrared lamp heater transmission window for semiconductor manufacturing apparatus

Ion shield plate base for semiconductor manufacturing apparatus

Integrated type ion shield for semiconductor manufacturing apparatus

Gas supply control device

Wafer processing method and wafer processing apparatus

Etching method and etching apparatus

Plasma processing method

Vacuum processing apparatus

Plasma etching method and plasma processing apparatus

Vacuum processing apparatus

Plasma processing apparatus

Plasma etching method and plasma etching apparatus

Detecting method and detecting device of gas components and processing apparatus using detecting device of gas components

Vacuum processing apparatus

Substrate processing method and plasma processing apparatus

Gas supply apparatus, vacuum processing apparatus, and gas supply method

Operation method of plasma processing apparatus

KOUZUMA YUTAKA

Manufacturing method in plasma processing apparatus

OHMOTO YUTAKA

Plasma processing method and plasma processing apparatus