Inventor
DELIGIANNI HARIKLIA
US171 patents
⚠️ This page may combine multiple inventors who share the name “DELIGIANNI HARIKLIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
43 patentsUS7892956B2Feb 22, 2011
Methods of manufacture of vertical nanowire FET devices
IBM61 citations98
US7008871B2Mar 7, 2006
Selective capping of copper wiring
IBM105 citations98
US6224690B1May 1, 2001
Flip-Chip interconnections using lead-free solders
IBM191 citations98
US6063506AMay 16, 2000
Copper alloys for chip and package interconnections
IBM116 citations98
US6709562B1Mar 23, 2004
Method of making electroplated interconnection structures on integrated circuit chips
IBM90 citations97
US6967131B2Nov 22, 2005
Field effect transistor with electroplated metal gate
IBM43 citations96
US6261426B1Jul 17, 2001
Method and apparatus for enhancing the uniformity of electrodeposition or electroetching
IBM77 citations96
US6090710AJul 18, 2000
Method of making copper alloys for chip and package interconnections
IBM73 citations96
US6639488B2Oct 28, 2003
MEMS RF switch with low actuation voltage
IBM75 citations95
US9654004B1May 16, 2017
3D integrated DC-DC power converters
IBM22 citations94
US9437668B1Sep 6, 2016
High resistivity soft magnetic material for miniaturized power converter
IBM24 citations94
US7736753B2Jun 15, 2010
Formation of nanostructures comprising compositionally modulated ferromagnetic layers by pulsed ECD
IBM23 citations93
US7405154B2Jul 29, 2008
Structure and method of forming electrodeposited contacts
IBM20 citations92
US7190079B2Mar 13, 2007
Selective capping of copper wiring
IBM39 citations92
US6977569B2Dec 20, 2005
Lateral microelectromechanical system switch
IBM33 citations92
US6974531B2Dec 13, 2005
Method for electroplating on resistive substrates
IBM20 citations92
US6917268B2Jul 12, 2005
Lateral microelectromechanical system switch
IBM41 citations92
US6876282B2Apr 5, 2005
Micro-electro-mechanical RF switch
IBM18 citations92
US6685814B2Feb 3, 2004
Method for enhancing the uniformity of electrodeposition or electroetching
IBM37 citations92
US6270646B1Aug 7, 2001
Electroplating apparatus and method using a compressible contact
IBM82 citations92
US7202764B2Apr 10, 2007
Noble metal contacts for micro-electromechanical switches
IBM39 citations91
US7112851B2Sep 26, 2006
Field effect transistor with electroplated metal gate
IBM36 citations91
US7060624B2Jun 13, 2006
Deep filled vias
IBM28 citations91
US7863189B2Jan 4, 2011
Methods for fabricating silicon carriers with conductive through-vias with low stress and low defect density
IBM32 citations90
US5385661AJan 31, 1995
Acid electrolyte solution and process for the electrodeposition of copper-rich alloys exploiting the phenomenon of underpotential deposition
IBM43 citations90
US10283249B2May 7, 2019
Method for fabricating a magnetic material stack
IBM7 citations84
US10065658B2Sep 4, 2018
Bias of physical controllers in a system
IBM10 citations84
US9859357B1Jan 2, 2018
Magnetic inductor stacks with multilayer isolation layers
IBM6 citations84
US9806615B1Oct 31, 2017
On-chip DC-DC power converters with fully integrated GaN power switches, silicon CMOS transistors and magnetic inductors
IBM7 citations84
US9793336B2Oct 17, 2017
High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors
IBM4 citations84
US9590026B2Mar 7, 2017
High resistivity iron-based, thermally stable magnetic material for on-chip integrated inductors
IBM6 citations84
US8354336B2Jan 15, 2013
Forming an electrode having reduced corrosion and water decomposition on surface using an organic protective layer
IBM10 citations84
US7868410B2Jan 11, 2011
Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow
IBM13 citations84
US7776680B2Aug 17, 2010
Complementary metal oxide semiconductor device with an electroplated metal replacement gate
IBM11 citations84
US7638406B2Dec 29, 2009
Method of fabricating a high Q factor integrated circuit inductor
IBM13 citations84
US7368045B2May 6, 2008
Gate stack engineering by electrochemical processing utilizing through-gate-dielectric current flow
IBM10 citations84
US7068138B2Jun 27, 2006
High Q factor integrated circuit inductor
IBM12 citations84
US6836029B2Dec 28, 2004
Micro-electromechanical switch having a conductive compressible electrode
IBM18 citations84
US7217655B2May 15, 2007
Electroplated CoWP composite structures as copper barrier layers
IBM11 citations83
US7193323B2Mar 20, 2007
Electroplated CoWP composite structures as copper barrier layers
IBM11 citations82
US7659200B2Feb 9, 2010
Self-constrained anisotropic germanium nanostructure from electroplating
IBM5 citations74
US7608538B2Oct 27, 2009
Formation of vertical devices by electroplating
IBM7 citations74
US10900924B2Jan 26, 2021
Porous nanostructured electrodes for detection of neurotransmitters
IBM2 citations73
DELIGIANNI HARIKLIA
3 patentsCABRAL JR CYRIL
1 patentBASKER VEERARAGHAVAN S
1 patentAHMED SHAFAAT
1 patentEBARA CORP
1 patentShowing the top 50 of 171 patents by PatentIndex Score.