Inventor
MURATA HITOSHI
JP31 patents
⚠️ This page may combine multiple inventors who share the name “MURATA HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
11 patentsUS9695511B2Jul 4, 2017
Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate
HITACHI INT ELECTRIC INC3 citations73
US10340151B2Jul 2, 2019
Substrate processing apparatus, heating apparatus, ceiling heat insulator, and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC2 citations72
US9587884B2Mar 7, 2017
Insulation structure and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC2 citations72
USD819463SJun 5, 2018
Protector tube for thermocouple
HITACHI INT ELECTRIC INC2 citations71
USD818850SMay 29, 2018
Protector tube for thermocouple
HITACHI INT ELECTRIC INC4 citations71
US9449849B2Sep 20, 2016
Method of manufacturing semiconductor device using meander-shaped heating element
HITACHI INT ELECTRIC INC2 citations62
US10597780B2Mar 24, 2020
Substrate processing apparatus, heater and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC0 citations52
USD795209SAug 22, 2017
Heater for semiconductor thermal process
HITACHI INT ELECTRIC INC1 citations52
USD793974SAug 8, 2017
Heater for semiconductor thermal process
HITACHI INT ELECTRIC INC0 citations52
USD793975SAug 8, 2017
Heater for semiconductor thermal process
HITACHI INT ELECTRIC INC0 citations52
US9957616B2May 1, 2018
Substrate processing apparatus and heating unit
HITACHI INT ELECTRIC INC0 citations42
KOKUSAI ELECTRIC CORP
8 patentsUS11043402B2Jun 22, 2021
Cooling unit, heat insulating structure, and substrate processing apparatus
KOKUSAI ELECTRIC CORP4 citations73
USD860419SSep 17, 2019
Electric furnace for substrate processing apparatus
KOKUSAI ELECTRIC CORP3 citations73
USD860420SSep 17, 2019
Electric furnace for substrate processing apparatus
KOKUSAI ELECTRIC CORP3 citations73
US12504332B2Dec 23, 2025
Substrate temperature sensor, substrate retainer and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
US12241159B2Mar 4, 2025
Substrate processing apparatus and ceiling heater
KOKUSAI ELECTRIC CORP0 citations62
US11906367B2Feb 20, 2024
Substrate temperature sensor, substrate retainer and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations62
US11359285B2Jun 14, 2022
Substrate processing apparatus, heater and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations62
US12293930B2May 6, 2025
Substrate processing apparatus, method of manufacturing semiconductor device and heater
KOKUSAI ELECTRIC CORP0 citations52
MURATA HITOSHI
4 patentsUS9460946B2Oct 4, 2016
Substrate processing apparatus and heating equipment
MURATA HITOSHI4 citations71
US8847124B2Sep 30, 2014
Heating device having a meander-shaped heating element with an insulating body accomodating the same, and the substrate processing apparatus including the same
MURATA HITOSHI1 citations50
US8535444B2Sep 17, 2013
Substrate processing apparatus, method of manufacturing semiconductor device, and ceiling insulating part
MURATA HITOSHI0 citations50
US9064912B2Jun 23, 2015
Heating device, substrate processing apparatus, and method of manufacturing semiconductor device
MURATA HITOSHI0 citations39
TOKYO ELECTRON LTD
2 patentsNISSAN MOTOR
2 patentsUS4575934AMar 18, 1986
Method and system for automatically attaching sub-assembly to main assembly using industrial robots
NISSAN MOTOR46 citations89
US4604797AAug 12, 1986
Method for automatically attaching sub-assembly to main assembly and system thereof using industrial robots
NISSAN MOTOR23 citations78