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Heater for semiconductor thermal process

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Assignee: HITACHI INT ELECTRIC INCPriority: Sep 29, 2015Filed: Mar 10, 2016Granted: Aug 8, 2017
Est. expirySep 29, 2035(~9.2 yrs left)· nominal 20-yr term from priority
Inventors:Hitoshi MurataTakatomo Yamaguchi
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CLAIM 
     
       The ornamental design for a heater for semiconductor thermal process, as shown and described.

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