Inventor
SANSONI STEVEN V
US24 patents
⚠️ This page may combine multiple inventors who share the name “SANSONI STEVEN V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUSD933725SOct 19, 2021
Deposition ring for a substrate processing chamber
APPLIED MATERIALS INC52 citations95
USD891382SJul 28, 2020
Process shield for a substrate processing chamber
APPLIED MATERIALS INC55 citations95
US7589950B2Sep 15, 2009
Detachable electrostatic chuck having sealing assembly
APPLIED MATERIALS INC69 citations94
USD947914SApr 5, 2022
Base plate for a processing chamber substrate support
APPLIED MATERIALS INC14 citations92
USD942516SFeb 1, 2022
Process shield for a substrate processing chamber
APPLIED MATERIALS INC17 citations91
USD960216SAug 9, 2022
Base plate for a processing chamber substrate support
APPLIED MATERIALS INC10 citations84
US9508584B2Nov 29, 2016
In-situ removable electrostatic chuck
APPLIED MATERIALS INC6 citations84
US8971009B2Mar 3, 2015
Electrostatic chuck with temperature control
APPLIED MATERIALS INC13 citations83
US9425076B2Aug 23, 2016
Substrate transfer robot end effector
APPLIED MATERIALS INC14 citations82
US9147592B2Sep 29, 2015
Linked vacuum processing tools and methods of using the same
APPLIED MATERIALS INC13 citations80
US10704147B2Jul 7, 2020
Process kit design for in-chamber heater and wafer rotating mechanism
APPLIED MATERIALS INC2 citations73
US9779971B2Oct 3, 2017
Methods and apparatus for rapidly cooling a substrate
APPLIED MATERIALS INC4 citations73
US9773692B2Sep 26, 2017
In-situ removable electrostatic chuck
APPLIED MATERIALS INC2 citations73
US10431489B2Oct 1, 2019
Substrate support apparatus having reduced substrate particle generation
APPLIED MATERIALS INC3 citations72
US9608549B2Mar 28, 2017
Electrostatic chuck
APPLIED MATERIALS INC4 citations72
US11887878B2Jan 30, 2024
Detachable biasable electrostatic chuck for high temperature applications
APPLIED MATERIALS INC2 citations71
US10312127B2Jun 4, 2019
Compliant robot blade for defect reduction
APPLIED MATERIALS INC2 citations70
US10312116B2Jun 4, 2019
Methods and apparatus for rapidly cooling a substrate
APPLIED MATERIALS INC1 citations62
US11348823B2May 31, 2022
Compliant robot blade for substrate support and transfer
APPLIED MATERIALS INC0 citations59
US12542256B2Feb 3, 2026
Batch processing chambers for plasma-enhanced deposition
APPLIED MATERIALS INC0 citations52
US11170982B2Nov 9, 2021
Methods and apparatus for producing low angle depositions
APPLIED MATERIALS INC0 citations49
US11414740B2Aug 16, 2022
Processing system for forming layers
APPLIED MATERIALS INC0 citations47