Inventor
RATHI SAKET
US15 patents
⚠️ This page may combine multiple inventors who share the name “RATHI SAKET”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
8 patentsUSD914620SMar 30, 2021
Vented susceptor
ASM IP HOLDING BV325 citations97
USD920936SJun 1, 2021
Higher temperature vented susceptor
ASM IP HOLDING BV15 citations92
USD958764SJul 26, 2022
Higher temperature vented susceptor
ASM IP HOLDING BV11 citations83
USD965524SOct 4, 2022
Susceptor support
ASM IP HOLDING BV2 citations72
USD965044SSep 27, 2022
Susceptor shaft
ASM IP HOLDING BV5 citations72
US11961756B2Apr 16, 2024
Vented susceptor
ASM IP HOLDING BV2 citations71
US11764101B2Sep 19, 2023
Susceptor for semiconductor substrate processing
ASM IP HOLDING BV4 citations71
US11946137B2Apr 2, 2024
Runout and wobble measurement fixtures
ASM IP HOLDING BV0 citations57
APPLIED MATERIALS INC
7 patentsUS11242600B2Feb 8, 2022
High temperature face plate for deposition application
APPLIED MATERIALS INC2 citations73
US11742185B2Aug 29, 2023
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC2 citations72
US12347653B2Jul 1, 2025
Uniform in situ cleaning and deposition
APPLIED MATERIALS INC0 citations62
US11697877B2Jul 11, 2023
High temperature face plate for deposition application
APPLIED MATERIALS INC0 citations62
US10373860B2Aug 6, 2019
Batch processing apparatus
APPLIED MATERIALS INC1 citations61
US12012653B2Jun 18, 2024
Cleaning assemblies for substrate processing chambers
APPLIED MATERIALS INC1 citations59
US10945313B2Mar 9, 2021
Methods and apparatus for a microwave batch curing process
APPLIED MATERIALS INC1 citations57