Inventor
SUNDARARAJAN MUKUND
US13 patents
⚠️ This page may combine multiple inventors who share the name “SUNDARARAJAN MUKUND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUSD893441SAug 18, 2020
Base plate for a processing chamber substrate support
APPLIED MATERIALS INC68 citations96
USD947914SApr 5, 2022
Base plate for a processing chamber substrate support
APPLIED MATERIALS INC14 citations92
USD960216SAug 9, 2022
Base plate for a processing chamber substrate support
APPLIED MATERIALS INC10 citations84
US12014906B2Jun 18, 2024
High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber
APPLIED MATERIALS INC2 citations72
US11887878B2Jan 30, 2024
Detachable biasable electrostatic chuck for high temperature applications
APPLIED MATERIALS INC2 citations71
US10373860B2Aug 6, 2019
Batch processing apparatus
APPLIED MATERIALS INC1 citations61
US12112890B2Oct 8, 2024
Top magnets for decreased non-uniformity in PVD
APPLIED MATERIALS INC0 citations59
US10945313B2Mar 9, 2021
Methods and apparatus for a microwave batch curing process
APPLIED MATERIALS INC1 citations57