Inventor
QUACH DAVID H
US26 patents
⚠️ This page may combine multiple inventors who share the name “QUACH DAVID H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SOKUDO CO LTD
8 patentsUS7357842B2Apr 15, 2008
Cluster tool architecture for processing a substrate
SOKUDO CO LTD106 citations98
US7274005B2Sep 25, 2007
Bake plate having engageable thermal mass
SOKUDO CO LTD12 citations84
US7297906B2Nov 20, 2007
Integrated thermal unit having a shuttle with two-axis movement
SOKUDO CO LTD11 citations83
US7282675B2Oct 16, 2007
Integrated thermal unit having a shuttle with a temperature controlled surface
SOKUDO CO LTD14 citations83
US7288746B2Oct 30, 2007
Integrated thermal unit having laterally adjacent bake and chill plates on different planes
SOKUDO CO LTD4 citations63
US7741585B2Jun 22, 2010
Integrated thermal unit having a shuttle with two-axis movement
SOKUDO CO LTD5 citations62
US7601934B2Oct 13, 2009
Integrated thermal unit having a shuttle with a temperature controlled surface
SOKUDO CO LTD6 citations62
US7427728B2Sep 23, 2008
Zone control heater plate for track lithography systems
SOKUDO CO LTD5 citations62
APPLIED MATERIALS INC
8 patentsUS7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US9412579B2Aug 9, 2016
Methods and apparatus for controlling substrate uniformity
APPLIED MATERIALS INC16 citations92
US7049612B2May 23, 2006
Electron beam treatment apparatus
APPLIED MATERIALS INC13 citations84
USD642605SAug 2, 2011
Lid assembly for a substrate processing chamber
APPLIED MATERIALS INC6 citations74
US10177050B2Jan 8, 2019
Methods and apparatus for controlling substrate uniformity
APPLIED MATERIALS INC5 citations72
US11434568B2Sep 6, 2022
Heated ceramic faceplate
APPLIED MATERIALS INC0 citations62
ISHIKAWA TETSUYA
7 patentsUS8550031B2Oct 8, 2013
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA13 citations92
US8215262B2Jul 10, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8181596B2May 22, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA15 citations92
US8146530B2Apr 3, 2012
Cluster tool architecture for processing a substrate
ISHIKAWA TETSUYA22 citations92
US8568529B2Oct 29, 2013
HVPE chamber hardware
ISHIKAWA TETSUYA4 citations62
US8491720B2Jul 23, 2013
HVPE precursor source hardware
ISHIKAWA TETSUYA4 citations62
USD664172SJul 24, 2012
Dome assembly for a deposition chamber
ISHIKAWA TETSUYA1 citations51