Inventor
MOTOYAMA YUTAKA
JP18 patents
⚠️ This page may combine multiple inventors who share the name “MOTOYAMA YUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
17 patentsUS11062904B2Jul 13, 2021
Method of forming polysilicon film and film forming apparatus
TOKYO ELECTRON LTD2 citations72
USD786810SMay 16, 2017
Dummy wafer
TOKYO ELECTRON LTD4 citations72
USD784937SApr 25, 2017
Dummy wafer
TOKYO ELECTRON LTD2 citations72
US11239076B2Feb 1, 2022
Film forming method and heat treatment apparatus
TOKYO ELECTRON LTD0 citations62
US11587787B2Feb 21, 2023
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations61
US12131947B2Oct 29, 2024
Method for manufacturing semiconductor device and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US11851752B2Dec 26, 2023
Method for forming silicon film and processing apparatus
TOKYO ELECTRON LTD0 citations56
US12191140B2Jan 7, 2025
Method for manufacturing semiconductor device and substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US9970111B2May 15, 2018
Substrate processing apparatus having ground electrode
TOKYO ELECTRON LTD1 citations51
USD785576SMay 2, 2017
Dummy wafer
TOKYO ELECTRON LTD1 citations51
US12027384B2Jul 2, 2024
Heat treatment apparatus and dummy substrate processing method
TOKYO ELECTRON LTD0 citations50
US11807938B2Nov 7, 2023
Exhaust device, processing system, and processing method
TOKYO ELECTRON LTD0 citations47
US10957535B2Mar 23, 2021
Semiconductor film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations41
US10676820B2Jun 9, 2020
Cleaning method and film forming method
TOKYO ELECTRON LTD0 citations41
US9776202B2Oct 3, 2017
Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus
TOKYO ELECTRON LTD0 citations41
US9487859B2Nov 8, 2016
Operating method of vertical heat treatment apparatus, storage medium, and vertical heat treatment apparatus
TOKYO ELECTRON LTD0 citations41
US9373498B2Jun 21, 2016
Method of operating vertical heat treatment apparatus, vertical heat treatment apparatus and non-transitory recording medium
TOKYO ELECTRON LTD0 citations41