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Dummy wafer

38
Assignee: TOKYO ELECTRON LTDPriority: Nov 13, 2014Filed: Apr 24, 2015Granted: Apr 25, 2017
Est. expiryNov 13, 2034(~8.3 yrs left)· nominal 20-yr term from priority
38
PatentIndex Score
2
Cited by
72
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a dummy wafer, as shown and described.

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