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Dummy wafer

34
Assignee: TOKYO ELECTRON LTDPriority: Nov 13, 2014Filed: Apr 24, 2015Granted: May 2, 2017
Est. expiryNov 13, 2034(~8.3 yrs left)· nominal 20-yr term from priority
Inventors:Yutaka MotoyamaKohei Fukushima
34
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1
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a dummy wafer, as shown and described.

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