Inventor · disambiguated record
Puneet Bajaj
Also filed as: BAJAJ PUNEET
6 granted patents·3 pending applications·494 citations·filing 2007–2014
83Inventor score
Top patents by PatentIndex Score
9 records- 0198US7780789B2Vortex chamber lids for atomic layer depositionAPPLIED MATERIALS INC·Filed 2007·Granted Aug 24, 2010·458 cites·24 claims
- 0293US9818585B2In situ plasma clean for removal of residue from pedestal surface without breaking vacuumAPPLIED MATERIALS INC·Filed 2014·Granted Nov 14, 2017·9 cites·20 claims
- 0389US8221602B2Non-contact process kitBROWN KARL·Filed 2007·Granted Jul 17, 2012·21 cites·26 claims
- 0479US8900471B2In situ plasma clean for removal of residue from pedestal surface without breaking vacuumGREEN RICHARD J·Filed 2010·Granted Dec 2, 2014·6 cites·17 claims
- 0549US2008102208A1Vortex chamber lids for atomic layer depositionWU DIEN-YEH·Filed 2007·Application pending·0 cites
- 0640US2008102203A1Vortex chamber lids for atomic layer depositionWU DIEN-YEH·Filed 2007·Application pending·0 cites
- 0738US2014179108A1Wafer Edge Protection and Efficiency Using Inert Gas and RingAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 0837US9023227B2Increased deposition efficiency and higher chamber conductance with source power increase in an inductively coupled plasma (ICP) chamberDINEV JIVKO·Filed 2012·Granted May 5, 2015·0 cites·20 claims
- 0934US8987140B2Methods for etching through-silicon vias with tunable profile anglesBAJAJ PUNEET·Filed 2012·Granted Mar 24, 2015·0 cites·17 claims
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