Inventor · disambiguated record
Hirofumi Arai
Also filed as: ARAI HIROFUMI
8 granted patents·1 pending application·2,575 citations·filing 1999–2023
92Inventor score
Top patents by PatentIndex Score
9 records- 0198US9136108B2Method for restoring porous surface of dielectric layer by UV light-assisted ALDASM IP HOLDING BV·Filed 2013·Granted Sep 15, 2015·518 cites·20 claims
- 0298US7234476B2Method of cleaning CVD equipment processing chamberASM JAPAN·Filed 2003·Granted Jun 26, 2007·523 cites·9 claims
- 0397US9190263B2Method for forming SiOCH film using organoaminosilane annealingASM IP HOLDING BV·Filed 2013·Granted Nov 17, 2015·518 cites·15 claims
- 0496US8466411B2Calibration method of UV sensor for UV curingARAI HIROFUMI·Filed 2011·Granted Jun 18, 2013·517 cites·20 claims
- 0595US9353441B2Heating/cooling pedestal for semiconductor-processing apparatusASM IP HOLDING BV·Filed 2012·Granted May 31, 2016·466 cites·17 claims
- 0682USD1036507SAir pumpNITTO KOHKI CO·Filed 2023·Granted Jul 23, 2024·7 cites·1 claims
- 0774US6136104ACopper alloy for terminals and connectors and method for making sameKOBE STEEL LTD·Filed 1999·Granted Oct 24, 2000·26 cites·14 claims
- 0851US12440702B2Radiation treatment system comprising a CT apparatus, a treatment planning apparatus, and a radiation control apparatus, radiation control method, and storage mediumANZAI MEDICAL CO LTD·Filed 2023·Granted Oct 14, 2025·0 cites·18 claims
- 0944US2008299747A1Method for forming amorphouse silicon film by plasma cvdASM JAPAN·Filed 2007·Application pending·0 cites
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