Inventor
PETERSON KIRK DAVID
US22 patents
⚠️ This page may combine multiple inventors who share the name “PETERSON KIRK DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
18 patentsUS6440851B1Aug 27, 2002
Method and structure for controlling the interface roughness of cobalt disilicide
IBM57 citations95
US6498096B2Dec 24, 2002
Borderless contact to diffusion with respect to gate conductor and methods for fabricating
IBM62 citations94
US6936910B2Aug 30, 2005
BiCMOS technology on SOI substrates
IBM48 citations92
US6215190B1Apr 10, 2001
Borderless contact to diffusion with respect to gate conductor and methods for fabricating
IBM18 citations89
US7609542B2Oct 27, 2009
Implementing enhanced SRAM read performance sort ring oscillator (PSRO)
IBM10 citations84
US7480170B1Jan 20, 2009
Method and apparatus for implementing enhanced SRAM read performance sort ring oscillator (PSRO)
IBM9 citations84
US11251179B2Feb 15, 2022
Long channel and short channel vertical FET co-integration for vertical FET VTFET
IBM3 citations73
US7081676B2Jul 25, 2006
Structure for controlling the interface roughness of cobalt disilicide
IBM5 citations73
US6436823B1Aug 20, 2002
Method for forming a TiN layer on top of a metal silicide layer in a semiconductor structure and structure formed
IBM7 citations71
US6335294B1Jan 1, 2002
Wet cleans for cobalt disilicide processing
IBM7 citations70
US12062657B2Aug 13, 2024
Long channel and short channel vertical FET co-integration for vertical FET VTFET
IBM0 citations62
US7687340B2Mar 30, 2010
Protect diodes for hybrid-orientation substrate structures
IBM3 citations62
US6809030B2Oct 26, 2004
Method and structure for controlling the interface roughness of cobalt disilicide
IBM2 citations62
US7696586B2Apr 13, 2010
Cobal disilicide structure
IBM2 citations59
US10784159B2Sep 22, 2020
Semiconductor device and method of forming the semiconductor device
IBM0 citations52
US10256145B2Apr 9, 2019
Semiconductor device and method of forming the semiconductor device
IBM0 citations52
US9966308B2May 8, 2018
Semiconductor device and method of forming the semiconductor device
IBM0 citations52
US7411258B2Aug 12, 2008
Cobalt disilicide structure
IBM0 citations48