Inventor · disambiguated record
Abbas Rastegar
Also filed as: RASTEGAR ABBAS
9 granted patents·14 pending applications·23 citations·filing 2005–2025
83Inventor score
Files withSEMATECH INC8APPLIED MATERIALS INC7RASTEGAR ABBAS6KONINKL PHILIPS ELECTRONICS NV1MALLOY MATT1
Top patents by PatentIndex Score
23 records- 0183US8888086B2Apparatus with surface protector to inhibit contaminationRASTEGAR ABBAS·Filed 2011·Granted Nov 18, 2014·7 cites·5 claims
- 0278US7629556B2Laser nozzle methods and apparatus for surface cleaningSEMATECH INC·Filed 2006·Granted Dec 8, 2009·7 cites·18 claims
- 0370US2025361647A1Uv energy sources for processing chambers, and related apparatus and methodsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0466US7921859B2Method and apparatus for an in-situ ultraviolet cleaning toolSEMATECH INC·Filed 2005·Granted Apr 12, 2011·2 cites·17 claims
- 0563US8097091B2Hot source cleaning systemRASTEGAR ABBAS·Filed 2005·Granted Jan 17, 2012·5 cites·18 claims
- 0663US2024234627A1Chambers, methods, and apparatus for generating atomic radicals using uv lightAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0761US11209727B2Ta—Cu alloy material for extreme ultraviolet mask absorberAPPLIED MATERIALS INC·Filed 2019·Granted Dec 28, 2021·0 cites·20 claims
- 0861US8539969B2Gigasonic brush for cleaning surfacesRASTEGAR ABBAS·Filed 2010·Granted Sep 24, 2013·1 cites·20 claims
- 0957US2025183066A1Photo-emitting plasma for activation in processing chambers, and related apparatus and methodsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1054US7497913B2Method and apparatus for colloidal particle cleaningSEMATECH INC·Filed 2006·Granted Mar 3, 2009·1 cites·11 claims
- 1153US10935896B2Cleaning solution mixing system with ultra-dilute cleaning solution and method of operation thereofAPPLIED MATERIALS INC·Filed 2017·Granted Mar 2, 2021·0 cites·16 claims
- 1252US2015062546A1Apparatus with surface protector to inhibit contaminationSEMATECH INC·Filed 2014·Application pending·0 cites
- 1350US2025385089A1Ultraviolet (uv) treatment chamber for low temperature epitaxial growthAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1449US8206510B2Method and apparatus for an in-situ ultraviolet cleaning toolRASTEGAR ABBAS·Filed 2011·Granted Jun 26, 2012·0 cites·17 claims
- 1549US2014123997A1Gigasonic Brush for Cleaning SurfacesSEMATECH INC·Filed 2013·Application pending·0 cites
- 1641US2015206738A1Surface Cleaning Method and Apparatus Using Surface Acoustic Wave DevicesSEMATECH INC·Filed 2014·Application pending·0 cites
- 1740US2020026178A1Extreme Ultraviolet Mask Absorber MaterialsAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 1840US2015158056A1Light-assisted acoustic cleaning toolSEMATECH INC·Filed 2013·Application pending·0 cites
- 1939US2006213615A1Laser nozzle cleaning toolSEMATECH INC·Filed 2005·Application pending·0 cites
- 2038US2008302390A1Cleaning a Mask SubstrateKONINKL PHILIPS ELECTRONICS NV·Filed 2005·Application pending·0 cites
- 2137US2014053868A1Method And Apparatus For Surface CleaningRASTEGAR ABBAS·Filed 2012·Application pending·0 cites
- 2237US2013340838A1Facilitating streaming fluid using acoustic wavesRASTEGAR ABBAS·Filed 2012·Application pending·0 cites
- 2330US2011272838A1Apparatus, System, and Method for Nanoimprint Template with a Backside Recess Having Tapered SidewallsMALLOY MATT·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →