Inventor · disambiguated record
Akshay Gunaji
Also filed as: GUNAJI AKSHAY
4 granted patents·5 pending applications·0 citations·filing 2019–2024
55Inventor score
Top patents by PatentIndex Score
9 records- 0171US11950384B2Dynamic electrical and fluid delivery system with indexing motion for batch processing chambersAPPLIED MATERIALS INC·Filed 2023·Granted Apr 2, 2024·0 cites·19 claims
- 0271US2024304470A1Heater assembly with process gap control for batch processing chambersAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0364US11602064B2Dynamic electrical and fluid delivery system with indexing motion for batch processing chambersAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·0 cites·20 claims
- 0460US12020957B2Heater assembly with process gap control for batch processing chambersAPPLIED MATERIALS INC·Filed 2020·Granted Jun 25, 2024·0 cites·18 claims
- 0556US2025132131A1Plasma modulation apparatus for substrate processing systemASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0653US12040210B2Multi-pressure bipolar electrostatic chuckingAPPLIED MATERIALS INC·Filed 2020·Granted Jul 16, 2024·0 cites·20 claims
- 0750US2019311887A1Multizone gas distribution apparatusAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0849US2019309418A1Multizone rotatable diffuser apparatusAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0941US2021388495A1Asymmetric exhaust pumping plate design for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →