Inventor · disambiguated record

Akshay Dipakkumar Harlalka

Also filed as: HARLALKA AKSHAY DIPAKKUMAR

1 granted patent·1 pending application·0 citations·filing 2019–2022

10Inventor score

Technology areasG03F

Files withASML HOLDING NV1 ASML NETHERLANDS BV1

Top patents by PatentIndex Score

2 records

0153US2024419088A1Method and apparatus for lithographic imagingASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
0242US11953838B2Lithography support cleaning with cleaning substrate having controlled geometry and compositionASML HOLDING NV·Filed 2019·Granted Apr 9, 2024·0 cites·29 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →