Inventor · disambiguated record
Akihiro Kuribayashi
Also filed as: KURIBAYASHI AKIHIRO
11 granted patents·4 pending applications·19 citations·filing 2010–2022
83Inventor score
Top patents by PatentIndex Score
15 records- 0185US9019684B2Electrostatic chuck and method for manufacturing electrostatic chuckSHINKO ELECTRIC IND CO·Filed 2013·Granted Apr 28, 2015·8 cites·7 claims
- 0281US11201053B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Dec 14, 2021·1 cites·3 claims
- 0381US8542474B2Electrostatic chuckYONEKURA HIROSHI·Filed 2010·Granted Sep 24, 2013·7 cites·4 claims
- 0469US10714332B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jul 14, 2020·1 cites·4 claims
- 0567US9922820B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 20, 2018·1 cites·4 claims
- 0667US9892909B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Feb 13, 2018·1 cites·7 claims
- 0756US11869793B2Electrostatic chuck and substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2021·Granted Jan 9, 2024·0 cites·9 claims
- 0854US12077855B2Cleaning method and film deposition apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Sep 3, 2024·0 cites·7 claims
- 0953US11473194B2Cleaning method of deposition apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 18, 2022·0 cites·9 claims
- 1053US2023193464A1Substrate processing apparatus and substrate removal methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1143US12432819B2Substrate fixing deviceSHINKO ELECTRIC IND CO·Filed 2021·Granted Sep 30, 2025·0 cites·8 claims
- 1239US2013148253A1Substrate temperature adjusting-fixing device and manufacturing method thereofSHINKO ELECTRIC IND CO·Filed 2012·Application pending·0 cites
- 1337US2017218517A1Method of forming nitride filmTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1436US2018135170A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1532US10090176B2Temperature adjustment deviceSHINKO ELECTRIC IND CO·Filed 2015·Granted Oct 2, 2018·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →