Inventor · disambiguated record
Akinori Shimamura
Also filed as: SHIMAMURA AKINORI
3 granted patents·5 pending applications·25 citations·filing 2005–2025
65Inventor score
Top patents by PatentIndex Score
8 records- 0183US8191505B2Process gas introducing mechanism and plasma processing deviceKAMAISHI TAKAYUKI·Filed 2009·Granted Jun 5, 2012·17 cites·22 claims
- 0274US7392252B2System, apparatus, and method for processing information, and computer program, and recording mediumFUJITSU LTD·Filed 2005·Granted Jun 24, 2008·8 cites·9 claims
- 0352US2023154777A1Substrate transfer apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0449US2024120225A1Apparatus for transferring substrate, substrate processing system and method of processing substrateTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0544US2025232994A1Substrate Transfer Module and Method for Manufacturing Substrate Transfer ModuleTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0643US2006060141A1Process gas introducing mechanism and plasma processing deviceTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 0741US10615378B2Reduced-pressure drying apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Apr 7, 2020·0 cites·20 claims
- 0838US2007089672A1Substrate placing mechanismSHIMAMURA AKINORI·Filed 2006·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Akinori Shimamura files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →