Inventor · disambiguated record
Akinori Shirato
Also filed as: SHIRATO AKINORI
12 granted patents·3 pending applications·46 citations·filing 2000–2020
87Inventor score
Files withNIKON CORP15
Top patents by PatentIndex Score
15 records- 0192US10268121B2Exposure apparatus and exposure method, and flat panel display manufacturing methodNIKON CORP·Filed 2016·Granted Apr 23, 2019·4 cites·100 claims
- 0290US10444642B2Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive methodNIKON CORP·Filed 2018·Granted Oct 15, 2019·3 cites·8 claims
- 0388US10048600B2Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive methodNIKON CORP·Filed 2015·Granted Aug 14, 2018·3 cites·23 claims
- 0483US6366341B1Exposure method and exposure apparatusNIKON CORP·Filed 2000·Granted Apr 2, 2002·32 cites·24 claims
- 0581US8349525B2Protective apparatus, mask, mask fabricating method and conveying apparatus, and exposure apparatusNIKON CORP·Filed 2010·Granted Jan 8, 2013·4 cites·20 claims
- 0671US11187987B2Exposure apparatus and exposure method, and flat panel display manufacturing methodNIKON CORP·Filed 2020·Granted Nov 30, 2021·0 cites·11 claims
- 0767US11169448B2Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive methodNIKON CORP·Filed 2020·Granted Nov 9, 2021·0 cites·8 claims
- 0867US11086236B2Exposure apparatus and exposure method, and flat panel display manufacturing methodNIKON CORP·Filed 2020·Granted Aug 10, 2021·0 cites·43 claims
- 0965US2020019074A1Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive methodNIKON CORP·Filed 2019·Application pending·0 cites
- 1065US2020363730A1Exposure apparatus and exposure method, and flat panel display manufacturing methodNIKON CORP·Filed 2020·Application pending·0 cites
- 1164US11392048B2Exposure apparatus, flat panel display manufacturing method, and device manufacturing methodNIKON CORP·Filed 2020·Granted Jul 19, 2022·0 cites·14 claims
- 1263US10656529B2Exposure apparatus and exposure method, and flat panel display manufacturing methodNIKON CORP·Filed 2019·Granted May 19, 2020·0 cites·14 claims
- 1354US10732510B2Exposure apparatus and exposure method, and flat panel display manufacturing methodNIKON CORP·Filed 2016·Granted Aug 4, 2020·0 cites·44 claims
- 1454US10732517B2Exposure apparatus and exposure method, and flat panel display manufacturing methodNIKON CORP·Filed 2016·Granted Aug 4, 2020·0 cites·41 claims
- 1551US2018364595A1Exposure apparatus, flat panel display manufacturing method, and device manufacturing methodNIKON CORP·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →