Inventor · disambiguated record
Akira Sumitani
Also filed as: SUMITANI AKIRA
27 granted patents·1 pending application·232 citations·filing 1994–2021
96Inventor score
Top patents by PatentIndex Score
28 records- 0191US7880153B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2008·Granted Feb 1, 2011·14 cites·15 claims
- 0290US6810061B2Discharge electrode and discharge electrode manufacturing methodKOMATSU MFG CO LTD·Filed 2002·Granted Oct 26, 2004·32 cites·20 claims
- 0388US8710475B2Extreme ultraviolet light source device and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2013·Granted Apr 29, 2014·7 cites·9 claims
- 0488US7923705B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2009·Granted Apr 12, 2011·25 cites·30 claims
- 0586US7915600B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2007·Granted Mar 29, 2011·22 cites·20 claims
- 0685US8492738B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2012·Granted Jul 23, 2013·6 cites·11 claims
- 0784US8256441B2Method for cleaning optical element of EUV light source device and optical element cleaning deviceMORIYA MASATO·Filed 2008·Granted Sep 4, 2012·15 cites·6 claims
- 0884US6496527B1Ultraviolet laser apparatus and gas for ultraviolet laserKOMATSU MFG CO LTD·Filed 2000·Granted Dec 17, 2002·24 cites·9 claims
- 0978US8536551B2Extreme ultra violet light source apparatusMORIYA MASATO·Filed 2009·Granted Sep 17, 2013·10 cites·14 claims
- 1075US8173984B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2009·Granted May 8, 2012·8 cites·27 claims
- 1172US8294129B2Extreme ultraviolet light source apparatusMORIYA MASATO·Filed 2011·Granted Oct 23, 2012·3 cites·7 claims
- 1271US8507883B2Extreme ultraviolet light source apparatusENDO AKIRA·Filed 2009·Granted Aug 13, 2013·8 cites·19 claims
- 1369US5811051AMethod and apparatus for continuously draw-molding fiber reinforced plastic rod formed with spiral grooveKOMATSU MFG CO LTD·Filed 1994·Granted Sep 22, 1998·36 cites·13 claims
- 1465US9926998B2Piston structure for engineMAZDA MOTOR·Filed 2013·Granted Mar 27, 2018·2 cites·3 claims
- 1563US7928418B2Extreme ultra violet light source apparatusGIGAHOTON INC·Filed 2009·Granted Apr 19, 2011·7 cites·7 claims
- 1661US8288743B2Apparatus for and method of withdrawing ions in EUV light production apparatusUENO YOSHIFUMI·Filed 2009·Granted Oct 16, 2012·4 cites·21 claims
- 1760US8698116B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Apr 15, 2014·1 cites·12 claims
- 1857US7683355B2Extreme ultra violet light source apparatusKOMATSU MFG CO LTD·Filed 2007·Granted Mar 23, 2010·4 cites·9 claims
- 1954US12180009B2Transport deviceIL PHARMA PACKAGING CO LTD·Filed 2021·Granted Dec 31, 2024·0 cites·6 claims
- 2051US8804902B2Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatusGIGAPHOTON INC·Filed 2013·Granted Aug 12, 2014·0 cites·10 claims
- 2147US2012298134A1Method for cleaning optical element of euv light source device and optical element cleaning deviceMORIYA MASATO·Filed 2012·Application pending·0 cites
- 2246US8471226B2Extreme ultraviolet light source device and method for producing extreme ultraviolet lightKOMORI HIROSHI·Filed 2009·Granted Jun 25, 2013·1 cites·17 claims
- 2343US12091262B2Article sorting deviceIL PHARMA PACKAGING CO LTD·Filed 2021·Granted Sep 17, 2024·0 cites·9 claims
- 2443US8354657B2Extreme ultra violet light source apparatusGIGAPHOTON INC·Filed 2011·Granted Jan 15, 2013·0 cites·8 claims
- 2540US8477412B2Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatusSOMEYA HIROSHI·Filed 2007·Granted Jul 2, 2013·0 cites·2 claims
- 2639US10612615B2Engine reciprocative rotating mechanism and method for manufacturing the sameMAZDA MOTOR·Filed 2018·Granted Apr 7, 2020·0 cites·7 claims
- 2737US10760636B2Engine reciprocative rotating mechanism and method for manufacturing the sameMAZDA MOTOR·Filed 2018·Granted Sep 1, 2020·0 cites·6 claims
- 2824US7006548B1Excimer laser device and gas for excimer laserKOMATSU MFG CO LTD·Filed 1999·Granted Feb 28, 2006·3 cites·13 claims
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