Inventor · disambiguated record
Akikazu Tanimoto
Also filed as: TANIMOTO AKIKAZU
52 granted patents·6 pending applications·3,038 citations·filing 1976–2018
99Inventor score
Top patents by PatentIndex Score
58 records- 0199US7388649B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2005·Granted Jun 17, 2008·121 cites·50 claims
- 0298US4970546AExposure control deviceNIKON CORP·Filed 1989·Granted Nov 13, 1990·236 cites·5 claims
- 0398US4465368AExposure apparatus for production of integrated circuitNIPPON KOGAKU KK·Filed 1981·Granted Aug 14, 1984·474 cites·10 claims
- 0497US5151749AMethod of and apparatus for measuring coordinate position and positioning an objectNIKON CORP·Filed 1991·Granted Sep 29, 1992·149 cites·6 claims
- 0597US4629313AExposure apparatusNIPPON KOGAKU KK·Filed 1985·Granted Dec 16, 1986·107 cites·25 claims
- 0696US5048926AIlluminating optical system in an exposure apparatusNIKON CORP·Filed 1989·Granted Sep 17, 1991·94 cites·22 claims
- 0796US4103998AAutomatic alignment apparatusNIPPON KOGAKU KK·Filed 1976·Granted Aug 1, 1978·92 cites·11 claims
- 0895US4690528AProjection exposure apparatusNIPPON KOGAKU KK·Filed 1984·Granted Sep 1, 1987·101 cites·17 claims
- 0995US4677301AAlignment apparatusNIPPON KOGAKU KK·Filed 1984·Granted Jun 30, 1987·90 cites·18 claims
- 1095US4468120AForeign substance inspecting apparatusNIPPON KOGAKU KK·Filed 1982·Granted Aug 28, 1984·107 cites·18 claims
- 1194US8174668B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2007·Granted May 8, 2012·11 cites·78 claims
- 1294US6727980B2Apparatus and method for pattern exposure and method for adjusting the apparatusNIKON CORP·Filed 2001·Granted Apr 27, 2004·55 cites·39 claims
- 1393US9304392B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2014·Granted Apr 5, 2016·4 cites·22 claims
- 1493US8760617B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2013·Granted Jun 24, 2014·4 cites·95 claims
- 1593US4701606AProjection optical apparatusNIPPON KOGAKU KK·Filed 1985·Granted Oct 20, 1987·83 cites·15 claims
- 1692US4769523ALaser processing apparatusNIPPON KOGAKU KK·Filed 1987·Granted Sep 6, 1988·153 cites·23 claims
- 1792US4586822AInspecting method for mask for producing semiconductor deviceNIPPON KOGAKU KK·Filed 1984·Granted May 6, 1986·62 cites·10 claims
- 1891US9939739B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2016·Granted Apr 10, 2018·2 cites·51 claims
- 1991US4801977AProjection optical apparatusNIKON CORP·Filed 1988·Granted Jan 31, 1989·63 cites·10 claims
- 2091US4112309AApparatus for measuring the line width of a patternNIPPON KOGAKU KK·Filed 1976·Granted Sep 5, 1978·47 cites·3 claims
- 2190US6713747B2Light exposure apparatusNIKON CORP·Filed 2002·Granted Mar 30, 2004·28 cites·12 claims
- 2290US4870452AProjection exposure apparatusNIKON CORP·Filed 1988·Granted Sep 26, 1989·56 cites·6 claims
- 2389US5656229AMethod for removing a thin film layerNIKON CORP·Filed 1995·Granted Aug 12, 1997·75 cites·7 claims
- 2489US4820899ALaser beam working systemNIKON CORP·Filed 1988·Granted Apr 11, 1989·51 cites·9 claims
- 2588US5597590AApparatus for removing a thin film layerNIKON CORP·Filed 1995·Granted Jan 28, 1997·72 cites·10 claims
- 2688US4711567AExposure apparatusNIPPON KOGAKU KK·Filed 1986·Granted Dec 8, 1987·44 cites·23 claims
- 2788US4699515AProcess of transfer of mask pattern onto substrate and apparatus for alignment therebetweenNIPPON KOGAKU KK·Filed 1985·Granted Oct 13, 1987·50 cites·17 claims
- 2887US8384877B2Exposure apparatus and method for producing deviceNIKON CORP·Filed 2007·Granted Feb 26, 2013·4 cites·30 claims
- 2987US8169592B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2008·Granted May 1, 2012·4 cites·83 claims
- 3087US8130363B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2008·Granted Mar 6, 2012·4 cites·36 claims
- 3187US8072576B2Exposure apparatus and method for producing deviceKOBAYASHI NAOYUKI·Filed 2007·Granted Dec 6, 2011·4 cites·38 claims
- 3287US4860374AApparatus for detecting position of reference patternNIKON CORP·Filed 1988·Granted Aug 22, 1989·109 cites·7 claims
- 3387US4610541AForeign substance inspecting apparatusNIPPON KOGAKU KK·Filed 1984·Granted Sep 9, 1986·43 cites·9 claims
- 3486US4853745AExposure apparatusNIKON CORP·Filed 1988·Granted Aug 1, 1989·43 cites·16 claims
- 3585US4884101AApparatus capable of adjusting the light amountNIKON CORP·Filed 1988·Granted Nov 28, 1989·40 cites·17 claims
- 3684US4687322AProjection optical apparatusNIPPON KOGAKU KK·Filed 1986·Granted Aug 18, 1987·39 cites·22 claims
- 3784US4636626AApparatus for aligning mask and wafer used in semiconductor circuit element fabricationNIPPON KOGAKU KK·Filed 1984·Granted Jan 13, 1987·38 cites·25 claims
- 3882US4730900AProjection optical apparatusNIPPON KOGAKU KK·Filed 1985·Granted Mar 15, 1988·50 cites·19 claims
- 3981US4385838AAlignment deviceNIPPON KOGAKU KK·Filed 1981·Granted May 31, 1983·34 cites·8 claims
- 4079US4702606APosition detecting systemNIPPON KOGAKU KK·Filed 1985·Granted Oct 27, 1987·30 cites·16 claims
- 4176US6894763B2Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the sameNIKON CORP·Filed 2003·Granted May 17, 2005·15 cites·103 claims
- 4273US4761561ALaser beam scanning pattern generation system with positional and dimensional error correctionNIPPON KOGAKU KK·Filed 1986·Granted Aug 2, 1988·38 cites·17 claims
- 4372US5663784ASlit-scanning type light exposure apparatusNIKON CORP·Filed 1995·Granted Sep 2, 1997·25 cites·15 claims
- 4471US6704088B2Environmental-control method and apparatus for an exposure systemNIKON CORP·Filed 2002·Granted Mar 9, 2004·10 cites·50 claims
- 4571US2018196352A1Exposure apparatus and method for producing deviceNIKON CORP·Filed 2018·Application pending·0 cites
- 4668US4568835AApparatus for detecting foreign matters on a planar substrateNIPPON KOGAKU KK·Filed 1982·Granted Feb 4, 1986·24 cites·9 claims
- 4761US2008231825A1Exposure Apparatus and method for producing deviceNIKON CORP·Filed 2008·Application pending·0 cites
- 4856US5906901AAlignment method and exposure apparatus for use in such alignment methodNIKON CORP·Filed 1995·Granted May 25, 1999·15 cites·37 claims
- 4953US4266876AAutomatic alignment apparatusNIPPON KOGAKU KK·Filed 1978·Granted May 12, 1981·11 cites·16 claims
- 5052US4776693AForeign substance inspecting system including a calibration standardNIPPON KOGAKU KK·Filed 1987·Granted Oct 11, 1988·15 cites·8 claims
Showing the top 50 of 58 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →