Inventor · disambiguated record
Alexander Buettner
Also filed as: BUETTNER ALEXANDER
9 granted patents·6 pending applications·33 citations·filing 2006–2024
84Inventor score
Top patents by PatentIndex Score
15 records- 0195US9921104B2Simultaneous multi-angle spectroscopyKLA TENCOR CORP·Filed 2016·Granted Mar 20, 2018·9 cites·21 claims
- 0290US10801953B2Semiconductor metrology based on hyperspectral imagingKLA TENCOR CORP·Filed 2019·Granted Oct 13, 2020·7 cites·23 claims
- 0386US9915524B2Optical metrology with small illumination spot sizeKLA TENCOR CORP·Filed 2015·Granted Mar 13, 2018·3 cites·20 claims
- 0484US10648796B2Optical metrology with small illumination spot sizeKLA TENCOR CORP·Filed 2018·Granted May 12, 2020·3 cites·13 claims
- 0583US10690602B2Methods and systems for measurement of thick films and high aspect ratio structuresKLA TENCOR CORP·Filed 2018·Granted Jun 23, 2020·3 cites·22 claims
- 0677US9091525B2Method for focusing an object plane and optical assemblySULIK WOLFGANG·Filed 2011·Granted Jul 28, 2015·8 cites·9 claims
- 0762US11119050B2Methods and systems for measurement of thick films and high aspect ratio structuresKLA CORP·Filed 2020·Granted Sep 14, 2021·0 cites·20 claims
- 0854US2024274401A1Substrate position monitoring devicesKLA CORP·Filed 2024·Application pending·0 cites
- 0947US2008144025A1Apparatus for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 1047US2008144014A1Apparatus for wafer inspectionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 1145US2009034832A1Device and method for scanning the whole surface of a waferVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
- 1244US11441893B2Multi-spot analysis system with multiple optical probesKLA TENCOR CORP·Filed 2018·Granted Sep 13, 2022·0 cites·47 claims
- 1342US7561263B2Apparatus for illuminating and inspecting a surfaceVISTEC SEMICONDUCTOR SYS GMBH·Filed 2006·Granted Jul 14, 2009·0 cites·15 claims
- 1438US2008031509A1Apparatus and method for measuring the height profile of a structured substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2007·Application pending·0 cites
- 1532US2015226539A1System and method for determining the position of defects on objects, coordinate measuring unit and computer program for coordinate measuring unitKLA TENCOR CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →