Inventor · disambiguated record
Alain Harrus
Also filed as: HARRUS ALAIN · HARRUS ALAIN S
4 granted patents·193 citations·filing 1988–2000
79Inventor score
Top patents by PatentIndex Score
4 records- 0198US6402923B1Method and apparatus for uniform electroplating of integrated circuits using a variable field shaping elementNOVELLUS SYSTEMS INC·Filed 2000·Granted Jun 11, 2002·163 cites·25 claims
- 0246US5841623AChuck for substrate processing and method for depositing a film in a radio frequency biased plasma chemical depositing systemLAM RES CORP·Filed 1995·Granted Nov 24, 1998·13 cites·14 claims
- 0340US4861126ALow temperature intrinsic gettering techniqueAMERICAN TELEPHONE & TELEGRAPH·Filed 1988·Granted Aug 29, 1989·10 cites·6 claims
- 0432US4980301AMethod for reducing mobile ion contamination in semiconductor integrated circuitsAT & T BELL LAB·Filed 1990·Granted Dec 25, 1990·7 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →