Inventor · disambiguated record
Albertus Hartgers
Also filed as: HARTGERS ALBERTUS
1 granted patent·1 pending application·0 citations·filing 2022–2025
6Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0156US2025199294A1Method to adjust an illumination beam path within an illumination optics and illumination optics having an adjustment systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0247US12411415B2Lithographic apparatus and method for illumination uniformity correctionASML NETHERLANDS BV·Filed 2022·Granted Sep 9, 2025·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →