Inventor · disambiguated record
Alan V. Hayes
Also filed as: HAYES ALAN · HAYES ALAN V
22 granted patents·5 pending applications·405 citations·filing 1986–2025
96Inventor score
Top patents by PatentIndex Score
27 records- 0189US8835869B2Ion sources and methods for generating an ion beam with controllable ion current density distributionYEVTUKHOV RUSTAM·Filed 2012·Granted Sep 16, 2014·18 cites·15 claims
- 0288US12249488B2Plasma shaper to control ion flux distribution of plasma sourceAPPLIED MATERIALS INC·Filed 2022·Granted Mar 11, 2025·1 cites·10 claims
- 0388US5969470ACharged particle sourceVEECO INSTR INC·Filed 1996·Granted Oct 19, 1999·59 cites·31 claims
- 0487US7557362B2Ion sources and methods for generating an ion beam with a controllable ion current density distributionVEECO INSTR INC·Filed 2007·Granted Jul 7, 2009·12 cites·34 claims
- 0586US2025364223A1Ion extraction optics having non uniform grid assemblyAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0685US7183716B2Charged particle source and operation thereofVEECO INSTR INC·Filed 2004·Granted Feb 27, 2007·46 cites·8 claims
- 0785US6716322B1Method and apparatus for controlling film profiles on topographic featuresVEECO INSTR INC·Filed 2002·Granted Apr 6, 2004·33 cites·51 claims
- 0884US10128083B2Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areasVEECO INSTR INC·Filed 2016·Granted Nov 13, 2018·4 cites·20 claims
- 0984US6150755ACharged particle source with liquid electrodeVEECO INSTR INC·Filed 1999·Granted Nov 21, 2000·42 cites·11 claims
- 1083US7414355B2Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 2005·Granted Aug 19, 2008·5 cites·8 claims
- 1182US6545580B2Electromagnetic field generator and method of operationVEECO INSTR INC·Filed 1998·Granted Apr 8, 2003·44 cites·28 claims
- 1281US12406833B2Ion extraction optics having non uniform grid assemblyAPPLIED MATERIALS INC·Filed 2023·Granted Sep 2, 2025·0 cites·12 claims
- 1381US8158016B2Methods of operating an electromagnet of an ion sourceHAYES ALAN V·Filed 2008·Granted Apr 17, 2012·11 cites·26 claims
- 1477US6590324B1Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 1999·Granted Jul 8, 2003·22 cites·9 claims
- 1576US9206500B2Method and apparatus for surface processing of a substrate using an energetic particle beamDRUZ BORIS·Filed 2008·Granted Dec 8, 2015·4 cites·20 claims
- 1674US7879201B2Method and apparatus for surface processing of a substrateVEECO INSTR INC·Filed 2004·Granted Feb 1, 2011·14 cites·15 claims
- 1774US6774550B2Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 2003·Granted Aug 10, 2004·7 cites·8 claims
- 1873US6464891B1Method for repetitive ion beam processing with a carbon containing ion beamVEECO INSTR INC·Filed 1999·Granted Oct 15, 2002·46 cites·28 claims
- 1964US12125680B2Ion extraction assembly having variable electrode thickness for beam uniformity controlAPPLIED MATERIALS INC·Filed 2021·Granted Oct 22, 2024·0 cites·18 claims
- 2062US7005782B2Charged particle beam extraction and formation apparatusVEECO INSTR INC·Filed 2004·Granted Feb 28, 2006·3 cites·7 claims
- 2157US6225747B1Charged-particle source, control system and process using gating to extract the charged particle beamVEECO INSTR INC·Filed 1999·Granted May 1, 2001·12 cites·20 claims
- 2256US2011089022A1Method and apparatus for surface processing of a substrateVEECO INSTR INC·Filed 2010·Application pending·0 cites
- 2353US5982101ACharged-particle source, control system, and process using gating to extract the ion beamVEECO INSTR INC·Filed 1997·Granted Nov 9, 1999·10 cites·29 claims
- 2445US2016071708A1Method and apparatus for surface processing of a substrate using an energetic particle beamDRUZ BORIS L·Filed 2015·Application pending·0 cites
- 2539US4724474APower bridge rectifier assemblyZENITH ELECTRONICS CORP·Filed 1986·Granted Feb 9, 1988·12 cites·10 claims
- 2639US2013206583A1Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle BeamVEECO INSTR INC·Filed 2013·Application pending·0 cites
- 2738US2019259559A1Plasma bridge neutralizer for ion beam etchingVEECO INSTR INC·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →