Inventor · disambiguated record
Allard Eelco Kooiker
Also filed as: KOOIKER ALLARD EELCO
9 granted patents·1 pending application·1 citations·filing 2010–2023
76Inventor score
Top patents by PatentIndex Score
10 records- 0175US12028000B2Object table comprising an electrostatic clampASML NETHERLANDS BV·Filed 2023·Granted Jul 2, 2024·0 cites·16 claims
- 0267US11637512B2Object table comprising an electrostatic clampASML NETHERLANDS BV·Filed 2021·Granted Apr 25, 2023·0 cites·16 claims
- 0367US9753382B2Sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·1 cites·20 claims
- 0459US11908656B2Stage apparatus suitable for a particle beam apparatusASML NETHERLANDS BV·Filed 2021·Granted Feb 20, 2024·0 cites·21 claims
- 0555US9971254B2Sensor, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 15, 2018·0 cites·20 claims
- 0651US11764030B2Stage apparatus suitable for electron beam inspection apparatusASML NETHERLANDS BV·Filed 2019·Granted Sep 19, 2023·0 cites·15 claims
- 0750US2023205101A1Apparatus for use in a metrology process or lithographic processASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0832US9081309B2Detector module, cooling arrangement and lithographic apparatus comprising a detector moduleKNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS·Filed 2010·Granted Jul 14, 2015·0 cites·18 claims
- 0931US10768025B2Encoder, position measurement system and lithographic apparatus involving an enclosing deviceASML NETHERLANDS BV·Filed 2015·Granted Sep 8, 2020·0 cites·21 claims
- 1029US8817228B2Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangementKNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS·Filed 2010·Granted Aug 26, 2014·0 cites·17 claims
Join the waitlist — get patent alerts
Get an alert when Allard Eelco Kooiker files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →