Inventor · disambiguated record
Alexander Novikov
Also filed as: NOVIKOV ALEXANDER
1 granted patent·2 pending applications·3 citations·filing 2018–2022
21Inventor score
Top patents by PatentIndex Score
3 records- 0179US10684563B2On the fly target acquisitionKLA TENCOR CORP·Filed 2018·Granted Jun 16, 2020·3 cites·19 claims
- 0256US2023324809A1Extra tall target metrologyKLA CORP·Filed 2022·Application pending·0 cites
- 0346US2023068016A1Systems and methods for rotational calibration of metrology toolsKLA CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →