Inventor · disambiguated record
Aleksey Petrenko
Also filed as: PETRENKO ALEKSEY
7 granted patents·18 citations·filing 2006–2014
77Inventor score
Top patents by PatentIndex Score
7 records- 0185US7436505B2Computer-implemented methods and systems for determining a configuration for a light scattering inspection systemKLA TENCOR TECH CORP·Filed 2006·Granted Oct 14, 2008·12 cites·22 claims
- 0270US9068952B2Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection systemPETRENKO ALEKSEY·Filed 2009·Granted Jun 30, 2015·4 cites·9 claims
- 0362US9194812B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·0 cites·26 claims
- 0461US8042254B1Method for improving edge handling chuck aerodynamicsKLA TENCOR CORP·Filed 2007·Granted Oct 25, 2011·1 cites·19 claims
- 0556US8786850B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2012·Granted Jul 22, 2014·0 cites·28 claims
- 0652US7605915B2System and method to create haze standardKLA TENCOR CORP·Filed 2007·Granted Oct 20, 2009·1 cites·14 claims
- 0743US8934091B2Monitoring incident beam position in a wafer inspection systemKLA TENCOR CORP·Filed 2013·Granted Jan 13, 2015·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →