Inventor · disambiguated record
Amir Azordegan
Also filed as: AZORDEGAN AMIR
15 granted patents·147 citations·filing 2003–2018
92Inventor score
Top patents by PatentIndex Score
15 records- 0196US9087176B1Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2014·Granted Jul 21, 2015·57 cites·20 claims
- 0290US10276346B1Particle beam inspector with independently-controllable beamsKLA TENCOR CORP·Filed 2016·Granted Apr 30, 2019·9 cites·41 claims
- 0385US7423269B1Automated feature analysis with off-axis tiltingKLA TENCOR TECH CORP·Filed 2006·Granted Sep 9, 2008·12 cites·13 claims
- 0484US6815675B1Method and system for e-beam scanningKLA TENCOR TECH CORP·Filed 2003·Granted Nov 9, 2004·19 cites·25 claims
- 0574US9029810B2Using wafer geometry to improve scanner correction effectiveness for overlay controlKLA TENCOR CORP·Filed 2014·Granted May 12, 2015·2 cites·20 claims
- 0673US10545412B2Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2015·Granted Jan 28, 2020·2 cites·18 claims
- 0772US7276690B1Method and system for e-beam scanningKLA TENCOR TECH CORP·Filed 2004·Granted Oct 2, 2007·8 cites·7 claims
- 0871US7173243B1Non-feature-dependent focusingKLA TENCOR TECH CORP·Filed 2004·Granted Feb 6, 2007·9 cites·6 claims
- 0968US7015468B1Methods of stabilizing measurement of ArF resist in CD-SEMKLA TENCOR TECH CORP·Filed 2004·Granted Mar 21, 2006·10 cites·20 claims
- 1068US6770879B1Motion picture output from electron microscopeKLA TENCOR TECH CORP·Filed 2003·Granted Aug 3, 2004·10 cites·20 claims
- 1167US9513565B2Using wafer geometry to improve scanner correction effectiveness for overlay controlKLA TENCOR CORP·Filed 2015·Granted Dec 6, 2016·1 cites·19 claims
- 1267US6995369B1Scanning electron beam apparatus and methods of processing data from sameKLA TENCOR TECH CORP·Filed 2004·Granted Feb 7, 2006·7 cites·18 claims
- 1361US9373165B2Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performanceKLA TENCOR CORP·Filed 2014·Granted Jun 21, 2016·1 cites·26 claims
- 1448US10769761B2Generating high resolution images from low resolution images for semiconductor applicationsKLA TENCOR CORP·Filed 2018·Granted Sep 8, 2020·0 cites·24 claims
- 1547US7405402B1Method and apparatus for aberration-insensitive electron beam imagingKLA TENCOR TECH CORP·Filed 2006·Granted Jul 29, 2008·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →