Inventor · disambiguated record
Anthony S. Geller
Also filed as: GELLER ANTHONY S
5 granted patents·59 citations·filing 1994–2014
79Inventor score
Top patents by PatentIndex Score
5 records- 0178US9244368B2Particle control near reticle and optics using showerheadDELGADO GILDARDO R·Filed 2013·Granted Jan 26, 2016·3 cites·16 claims
- 0276US9389180B2Methods and apparatus for use with extreme ultraviolet light having contamination protectionKLA TENCOR CORP·Filed 2014·Granted Jul 12, 2016·2 cites·29 claims
- 0366US5522933AParticle-free microchip processingFiled 1994·Granted Jun 4, 1996·28 cites·6 claims
- 0449US6110844AReduction of particle deposition on substrates using temperature gradient controlSANDIA CORP·Filed 1995·Granted Aug 29, 2000·17 cites·28 claims
- 0539US5777245AParticle dispersing system and method for testing semiconductor manufacturing equipmentAPPLIED MATERIALS INC·Filed 1996·Granted Jul 7, 1998·9 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →