Inventor · disambiguated record
Anthony Renau
Also filed as: RENAU ANTHONY
69 granted patents·21 pending applications·867 citations·filing 1987–2024
99Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT45VARIAN SEMICONDUCTOR EQUIPMENT ASS INC19APPLIED MATERIALS INC9GODET LUDOVIC4RENAU ANTHONY3
Top patents by PatentIndex Score
90 records- 0198US11217427B1System, apparatus and method for bunched ribbon ion beamAPPLIED MATERIALS INC·Filed 2020·Granted Jan 4, 2022·5 cites·19 claims
- 0297US8101510B2Plasma processing apparatusGODET LUDOVIC·Filed 2009·Granted Jan 24, 2012·50 cites·19 claims
- 0397US5350926ACompact high current broad beam ion implanterDIAMOND SEMICONDUCTOR GROUP·Filed 1993·Granted Sep 27, 1994·195 cites·23 claims
- 0496US6437350B1Methods and apparatus for adjusting beam parallelism in ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Aug 20, 2002·67 cites·26 claims
- 0595US9337040B1Angled ion beam processing of heterogeneous structureVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2015·Granted May 10, 2016·12 cites·17 claims
- 0695US8698107B2Technique and apparatus for monitoring ion mass, energy, and angle in processing systemsGODET LUDOVIC·Filed 2011·Granted Apr 15, 2014·26 cites·14 claims
- 0794US8664098B2Plasma processing apparatusGODET LUDOVIC·Filed 2012·Granted Mar 4, 2014·7 cites·17 claims
- 0894US6777686B2Control system for indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Aug 17, 2004·61 cites·10 claims
- 0993US11569063B2Apparatus, system and method for energy spread ion beamAPPLIED MATERIALS INC·Filed 2021·Granted Jan 31, 2023·2 cites·20 claims
- 1093US6130436AAcceleration and analysis architecture for ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Oct 10, 2000·109 cites·32 claims
- 1190US7459704B2Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atomsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 2, 2008·17 cites·36 claims
- 1289US11069511B2System and methods using an inline surface engineering sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 20, 2021·4 cites·6 claims
- 1389US10607847B1Gate all around device and method of formation using angled ionsAPPLIED MATERIALS INC·Filed 2018·Granted Mar 31, 2020·4 cites·15 claims
- 1489US6313475B1Acceleration and analysis architecture for ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Nov 6, 2001·39 cites·16 claims
- 1587US6573518B1Bi mode ion implantation with non-parallel ion beamsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Jun 3, 2003·23 cites·28 claims
- 1686US9293301B2In situ control of ion angular distribution in a processing apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Mar 22, 2016·7 cites·15 claims
- 1786US7675047B2Technique for shaping a ribbon-shaped ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Mar 9, 2010·9 cites·20 claims
- 1885US10665433B2Extreme edge uniformity controlVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted May 26, 2020·3 cites·16 claims
- 1985US4825087ASystem and methods for wafer charge reduction for ion implantationAPPLIED MATERIALS INC·Filed 1987·Granted Apr 25, 1989·36 cites·14 claims
- 2084US8937004B2Apparatus and method for controllably implanting workpiecesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jan 20, 2015·5 cites·13 claims
- 2184US7642150B2Techniques for forming shallow junctionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 5, 2010·9 cites·29 claims
- 2283US7402816B2Electron injection in ion implanter magnetsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 22, 2008·7 cites·24 claims
- 2383US7250617B2Ion beam neutral detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 31, 2007·7 cites·24 claims
- 2483US6791097B2Adjustable conductance limiting aperture for ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Sep 14, 2004·19 cites·25 claims
- 2580US6635880B1High transmission, low energy beamline architecture for ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1999·Granted Oct 21, 2003·34 cites·19 claims
- 2680US2024297016A1Apparatus and techniques for substrate processing using independent ion source and radical sourceAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2779US9922795B2High brightness ion beam extraction using bias electrodes and magnets proximate the extraction apertureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Mar 20, 2018·2 cites·18 claims
- 2878US9620335B2In situ control of ion angular distribution in a processing apparatusVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Apr 11, 2017·2 cites·14 claims
- 2977US7683347B2Technique for improving ion implantation throughput and dose uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Mar 23, 2010·4 cites·49 claims
- 3077US7579605B2Multi-purpose electrostatic lens for an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Aug 25, 2009·4 cites·32 claims
- 3176US9773636B2Apparatus and method for generating high current negative hydrogen ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Sep 26, 2017·2 cites·13 claims
- 3276US7276847B2Cathode assembly for indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Oct 2, 2007·14 cites·25 claims
- 3376US2024096602A1System And Methods Using An Inline Surface Engineering SourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2023·Application pending·0 cites
- 3475US7166854B2Uniformity control multiple tilt axes, rotating wafer and variable scan velocityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Jan 23, 2007·17 cites·20 claims
- 3574US8461030B2Apparatus and method for controllably implanting workpiecesRENAU ANTHONY·Filed 2010·Granted Jun 11, 2013·3 cites·19 claims
- 3674US7170067B2Ion beam measurement apparatus and methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jan 30, 2007·3 cites·18 claims
- 3773US11862433B2System and methods using an inline surface engineering sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2021·Granted Jan 2, 2024·0 cites·7 claims
- 3873US8716682B2Apparatus and method for multiple slot ion implantationRENAU ANTHONY·Filed 2011·Granted May 6, 2014·3 cites·20 claims
- 3973US7812325B2Implanting with improved uniformity and angle control on tilted wafersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Oct 12, 2010·4 cites·11 claims
- 4071US11996266B2Apparatus and techniques for substrate processing using independent ion source and radical sourceAPPLIED MATERIALS INC·Filed 2020·Granted May 28, 2024·0 cites·19 claims
- 4171US10692872B2Device structure for forming semiconductor device having angled contactsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 23, 2020·1 cites·12 claims
- 4271US9453279B2Method for selectively depositing a layer on a three dimensional structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Sep 27, 2016·1 cites·8 claims
- 4371US7863520B2Interfacing two insulation parts in high voltage environmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 4, 2011·2 cites·5 claims
- 4471US7820986B2Techniques for controlling a charged particle beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Oct 26, 2010·2 cites·19 claims
- 4571US7459692B2Electron confinement inside magnet of ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 2, 2008·2 cites·23 claims
- 4670US9520360B2Angled ion beam processing of heterogeneous structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Dec 13, 2016·1 cites·18 claims
- 4770US7339179B2Technique for providing a segmented electrostatic lens in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Mar 4, 2008·2 cites·19 claims
- 4869US7402820B2Ion beam contamination determinationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 22, 2008·3 cites·35 claims
- 4967US10990014B2Performance improvement of EUV photoresist by ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Apr 27, 2021·0 cites·11 claims
- 5067US10886279B2Device structure for forming semiconductor device having angled contactsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Jan 5, 2021·0 cites·20 claims
Showing the top 50 of 90 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →