Inventor · disambiguated record
Anton Vihervaara
Also filed as: VIHERVAARA ANTON
6 granted patents·5 pending applications·6 citations·filing 2019–2025
72Inventor score
Files withASM IP HOLDING BV11
Top patents by PatentIndex Score
11 records- 0194US12065739B2Vapor deposition processesASM IP HOLDING BV·Filed 2022·Granted Aug 20, 2024·2 cites·20 claims
- 0293US11492703B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2019·Granted Nov 8, 2022·4 cites·18 claims
- 0388US2025389020A1Method and system for depositing noble metal-containing layerASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0487US12442076B2Method and system for depositing noble metal-containing layerASM IP HOLDING BV·Filed 2024·Granted Oct 14, 2025·0 cites·26 claims
- 0583US2024417852A1Vapor deposition processesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0679US12104250B2Vapor deposition processesASM IP HOLDING BV·Filed 2022·Granted Oct 1, 2024·0 cites·19 claims
- 0774US2024368763A1Vapor Deposition ProcessesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 0873US12509765B2Method and system for depositing transition metal carbideASM IP HOLDING BV·Filed 2024·Granted Dec 30, 2025·0 cites·24 claims
- 0973US11814715B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2022·Granted Nov 14, 2023·0 cites·18 claims
- 1052US2025263833A1Method and system for depositing a metal-containing layerASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1150US2025188602A1Method and system for depositing transition metal carbideASM IP HOLDING BV·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →