Inventor · disambiguated record
Andrey E. Yakshin
Also filed as: YAKSHIN ANDREY E · YAKSHIN ANDREY EVGENJEVICH
8 granted patents·7 pending applications·86 citations·filing 2001–2019
85Inventor score
Files withYAKSHIN ANDREY E3ZEISS CARL SMT AG3ZEISS CARL SMT GMBH3ZEISS STIFTUNG2STICHTING FUND OND MATERIAL1
Top patents by PatentIndex Score
15 records- 0183US6656575B2Multilayer system with protecting layer system and production methodZEISS STIFTUNG·Filed 2001·Granted Dec 2, 2003·33 cites·3 claims
- 0278US7172788B2Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor deviceZEISS CARL SMT AG·Filed 2002·Granted Feb 6, 2007·19 cites·24 claims
- 0375US8144830B2Reflective optical element for EUV lithography deviceYAKSHIN ANDREY E·Filed 2009·Granted Mar 27, 2012·10 cites·21 claims
- 0475US7261957B2Multilayer system with protecting layer system and production methodZEISS CARL SMT AG·Filed 2003·Granted Aug 28, 2007·21 cites·6 claims
- 0563US8025777B2Processes and device for the deposition of films on substratesZEISS CARL SMT GMBH·Filed 2009·Granted Sep 27, 2011·0 cites·4 claims
- 0657US8475635B2Processes and device for the deposition of films on substratesYAKSHIN ANDREY E·Filed 2011·Granted Jul 2, 2013·0 cites·8 claims
- 0750US2007281109A1Multilayer system with protecting layer system and production methodZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 0849US6483597B2Method for the production of multi-layer systemsZEISS STIFTUNG·Filed 2001·Granted Nov 19, 2002·3 cites·15 claims
- 0947US10916356B2Reflective optical elementZEISS CARL SMT GMBH·Filed 2019·Granted Feb 9, 2021·0 cites·15 claims
- 1041US2005150758A1Processes and device for the deposition of films on substratesFiled 2004·Application pending·0 cites
- 1139US2005111083A1Optical broad band element and process for its productionFiled 2004·Application pending·0 cites
- 1238US2004052942A1Method for coating substrates and mask holderFiled 2001·Application pending·0 cites
- 1334US2016116648A1Optical element comprising a multilayer coating, and optical arrangement comprising sameZEISS CARL SMT GMBH·Filed 2015·Application pending·0 cites
- 1434US2010171050A1Method for regenerating a surface of an optical element in an xuv radiation source, and xuv radiation sourceSTICHTING FUND OND MATERIAL·Filed 2007·Application pending·0 cites
- 1534US2004245090A1Process for manufacturing multilayer systemsYAKSHIN ANDREY E·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →