Inventor · disambiguated record
Andrey Mikhailovich Yakunin
Also filed as: YAKUNIN ANDREY MIKHAILOVICH
2 granted patents·1 pending application·3 citations·filing 2009–2012
46Inventor score
Top patents by PatentIndex Score
3 records- 0183US9041912B2Spectral purity filters for use in a lithographic apparatusSOER WOUTER ANTHON·Filed 2012·Granted May 26, 2015·3 cites·13 claims
- 0251US8390788B2Spectral purity filters for use in a lithographic apparatusSOER WOUTER ANTHON·Filed 2009·Granted Mar 5, 2013·0 cites·13 claims
- 0336US2011044425A1Spectral purity filters for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →