Inventor · disambiguated record
Armen Avoyan
Also filed as: AVOYAN ARMEN
32 granted patents·2 pending applications·307 citations·filing 2003–2021
96Inventor score
Top patents by PatentIndex Score
34 records- 0196US7052553B1Wet cleaning of electrostatic chucksLAM RES CORP·Filed 2004·Granted May 30, 2006·174 cites·21 claims
- 0293US6873114B2Method for toolmatching and troubleshooting a plasma processing systemLAM RES CORP·Filed 2003·Granted Mar 29, 2005·45 cites·18 claims
- 0387US7942973B2Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatusesLAM RES CORP·Filed 2006·Granted May 17, 2011·9 cites·12 claims
- 0484US10967407B2Conditioning chamber componentLAM RES CORP·Filed 2018·Granted Apr 6, 2021·3 cites·11 claims
- 0583US8171877B2Backside mounted electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted May 8, 2012·8 cites·20 claims
- 0682US8075701B2Processes for reconditioning multi-component electrodesAVOYAN ARMEN·Filed 2008·Granted Dec 13, 2011·7 cites·20 claims
- 0782US7578889B2Methodology for cleaning of surface metal contamination from electrode assembliesLAM RES CORP·Filed 2007·Granted Aug 25, 2009·9 cites·18 claims
- 0881US8215321B2Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatusesSHIH HONG·Filed 2011·Granted Jul 10, 2012·3 cites·18 claims
- 0981US6919689B2Method for toolmatching and troubleshooting a plasma processing systemLAM RES CORP·Filed 2003·Granted Jul 19, 2005·16 cites·21 claims
- 1080US8075703B2Immersive oxidation and etching process for cleaning silicon electrodesAVOYAN ARMEN·Filed 2009·Granted Dec 13, 2011·4 cites·21 claims
- 1177US9079228B2Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamberSHIH HONG·Filed 2010·Granted Jul 14, 2015·2 cites·13 claims
- 1277US8276898B2Electrode transporter and fixture sets incorporating the sameAVOYAN ARMEN·Filed 2008·Granted Oct 2, 2012·9 cites·18 claims
- 1372US10391526B2Electrostatic chuck cleaning fixtureLAM RES CORP·Filed 2013·Granted Aug 27, 2019·3 cites·13 claims
- 1472US9396912B2Methods for mixed acid cleaning of showerhead electrodesAVOYAN ARMEN·Filed 2012·Granted Jul 19, 2016·1 cites·20 claims
- 1572US8276604B2Peripherally engaging electrode carriers and assemblies incorporating the sameAUGUSTINO JASON·Filed 2008·Granted Oct 2, 2012·4 cites·16 claims
- 1671US9293305B2Mixed acid cleaning assembliesAVOYAN ARMEN·Filed 2012·Granted Mar 22, 2016·2 cites·20 claims
- 1771US8022718B2Method for inspecting electrostatic chucks with Kelvin probe analysisLAM RES CORP·Filed 2009·Granted Sep 20, 2011·3 cites·11 claims
- 1869US12064795B2Conditioning chamber componentLAM RES CORP·Filed 2021·Granted Aug 20, 2024·0 cites·11 claims
- 1965US8550880B2Platen and adapter assemblies for facilitating silicon electrode polishingAVOYAN ARMEN·Filed 2009·Granted Oct 8, 2013·0 cites·19 claims
- 2064US8545639B2Method of cleaning aluminum plasma chamber partsSHIH HONG·Filed 2011·Granted Oct 1, 2013·1 cites·19 claims
- 2164US8221552B2Cleaning of bonded silicon electrodesOUTKA DUANE·Filed 2007·Granted Jul 17, 2012·3 cites·20 claims
- 2260US9406534B2Wet clean process for cleaning plasma processing chamber componentsLAM RES CORP·Filed 2014·Granted Aug 2, 2016·1 cites·16 claims
- 2359US9120201B2Platen and adapter assemblies for facilitating silicon electrode polishingLAM RES CORP·Filed 2013·Granted Sep 1, 2015·0 cites·20 claims
- 2454US12072318B2Chamber component cleanliness measurement systemLAM RES CORP·Filed 2020·Granted Aug 27, 2024·0 cites·22 claims
- 2551US8945317B2System and method for cleaning gas injectorsLAM RES CORP·Filed 2012·Granted Feb 3, 2015·0 cites·12 claims
- 2651US2005151479A1Method for toolmatching and troubleshooting a plasma processing systemLAM RES CORP A DELAWARE CORP·Filed 2005·Application pending·0 cites
- 2750US9623449B2Dielectric window cleaning apparatusesAVOYAN ARMEN·Filed 2012·Granted Apr 18, 2017·0 cites·18 claims
- 2849US9748078B2Dual phase cleaning chambers and assemblies comprising the sameLAM RES CORP·Filed 2016·Granted Aug 29, 2017·0 cites·16 claims
- 2948US9390895B2Gas injector particle removal process and apparatusLAM RES CORP·Filed 2013·Granted Jul 12, 2016·0 cites·19 claims
- 3046US9245719B2Dual phase cleaning chambers and assemblies comprising the sameAVOYAN ARMEN·Filed 2011·Granted Jan 26, 2016·0 cites·22 claims
- 3142US9505036B2Portable sonic particle removal tool with a chemically controlled working fluidLAM RES CORP·Filed 2013·Granted Nov 29, 2016·0 cites·19 claims
- 3235US8444456B2Electrode securing platens and electrode polishing assemblies incorporating the sameLA CROIX CLIFF·Filed 2010·Granted May 21, 2013·0 cites·20 claims
- 3335US2005217795A1Method of plasma etch endpoint detection using a V-I probe diagnosticsAVOYAN ARMEN·Filed 2004·Application pending·0 cites
- 3432US8580079B2Electrode carrier assembliesLA CROIX CLIFF·Filed 2010·Granted Nov 12, 2013·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →