Inventor · disambiguated record
Arie Cornelis Scheiberlich
Also filed as: SCHEIBERLICH ARIE C · SCHEIBERLICH ARIE CORNELIS
3 granted patents·1 pending application·144 citations·filing 1999–2023
73Inventor score
Top patents by PatentIndex Score
4 records- 0191US6388823B1Optical system, especially a projection light facility for microlithographyZEISS STIFTUNG·Filed 1999·Granted May 14, 2002·126 cites·13 claims
- 0273US6721036B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Apr 13, 2004·16 cites·17 claims
- 0372US11664264B2Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2016·Granted May 30, 2023·2 cites·24 claims
- 0464US2023260820A1Lithographic apparatus, method for unloading a substrate and method for loading a substrateASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Arie Cornelis Scheiberlich files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →