Inventor · disambiguated record
Arno Schmittner
Also filed as: SCHMITTNER ARNO
7 granted patents·1 pending application·10 citations·filing 2009–2023
75Inventor score
Files withZEISS CARL SMT GMBH4SCHMITTNER ARNO2HOTTINGER BALDWIN MESSTECHNIK GMBH1ZEISS CARL LASER OPTICS GMBH1
Top patents by PatentIndex Score
8 records- 0172US9903772B2Hermetic weighing cell having overload protectionHOTTINGER BALDWIN MESSTECHNIK GMBH·Filed 2015·Granted Feb 27, 2018·2 cites·21 claims
- 0267US9164004B2Hermetic weighing cell having overload protectionSCHMITTNER ARNO·Filed 2011·Granted Oct 20, 2015·4 cites·20 claims
- 0362US12353137B2Field facet system and lithography apparatusZEISS CARL SMT GMBH·Filed 2023·Granted Jul 8, 2025·0 cites·20 claims
- 0454US10578974B2Optical element, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2019·Granted Mar 3, 2020·0 cites·20 claims
- 0553US11099484B2Method for repairing reflective optical elements for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
- 0652US9255832B2Bending beam load cell with enclosureSCHMITTNER ARNO·Filed 2009·Granted Feb 9, 2016·4 cites·25 claims
- 0745US10303067B2Cooler for use in a device in a vacuumZEISS CARL SMT GMBH·Filed 2016·Granted May 28, 2019·0 cites·22 claims
- 0834US2015083938A1Cooler for plasma generation chamber of euv radiation sourceZEISS CARL LASER OPTICS GMBH·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →