Inventor · disambiguated record
Armin Schoeppach
Also filed as: SCHOEPPACH ARMIN
30 granted patents·14 pending applications·98 citations·filing 2003–2018
96Inventor score
Top patents by PatentIndex Score
44 records- 0193US8508868B2Holding arrangement for an optical elementWEBER ULRICH·Filed 2012·Granted Aug 13, 2013·23 cites·20 claims
- 0289US7729065B2Optical element unitZEISS CARL SMT AG·Filed 2008·Granted Jun 1, 2010·11 cites·72 claims
- 0387US8885143B2Projection exposure apparatus for microlithography for the production of semiconductor componentsFISCHER JUERGEN·Filed 2011·Granted Nov 11, 2014·7 cites·26 claims
- 0486US8873122B2Microlithographic imaging optical system including multiple mirrorsMANN HANS-JUERGEN·Filed 2011·Granted Oct 28, 2014·4 cites·23 claims
- 0582US9104016B2Optical projection systemZEISS CARL SMT GMBH·Filed 2012·Granted Aug 11, 2015·2 cites·24 claims
- 0678US9175948B2Optical module with a measuring deviceZEISS CARL SMT GMBH·Filed 2013·Granted Nov 3, 2015·4 cites·21 claims
- 0778US8705185B2Optical elementRAU JOHANNES·Filed 2012·Granted Apr 22, 2014·4 cites·20 claims
- 0876US9341807B2Gravitation compensation for optical elements in projection exposure apparatusesZEISS CARL SMT GMBH·Filed 2014·Granted May 17, 2016·3 cites·32 claims
- 0976US8300210B2Optical projection systemRAU JOHANNES·Filed 2005·Granted Oct 30, 2012·3 cites·33 claims
- 1074US9604299B2Method and device for connecting an optical element to a frameZEISS CARL SMT GMBH·Filed 2014·Granted Mar 28, 2017·2 cites·22 claims
- 1173US8339569B2Temperature-control device for an optical assemblySCHOEPPACH ARMIN·Filed 2011·Granted Dec 25, 2012·2 cites·15 claims
- 1273US7239462B2Objective with at least one optical elementZEISS CARL SMT AG·Filed 2005·Granted Jul 3, 2007·6 cites·21 claims
- 1373US7079331B2Device for holding a beam splitter elementZEISS CARL SMT AG·Filed 2005·Granted Jul 18, 2006·7 cites·29 claims
- 1470US9557653B2Optical projection systemZEISS CARL SMT GMBH·Filed 2015·Granted Jan 31, 2017·1 cites·30 claims
- 1570US8705006B2Method and device for connecting an optical element to a frameSCHOEPPACH ARMIN·Filed 2009·Granted Apr 22, 2014·6 cites·29 claims
- 1668US9436101B2Optical arrangement and microlithographic projection exposure apparatus including sameSCHOEPPACH ARMIN·Filed 2012·Granted Sep 6, 2016·2 cites·27 claims
- 1765US8659745B2Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrationsZEISS CARL SMT GMBH·Filed 2013·Granted Feb 25, 2014·1 cites·32 claims
- 1863US2018259856A1Optical Projection SystemZEISS CARL SMT GMBH·Filed 2018·Application pending·0 cites
- 1962US9891535B2Optical projection systemZEISS CARL SMT GMBH·Filed 2017·Granted Feb 13, 2018·0 cites·20 claims
- 2061US8854603B2Gravitation compensation for optical elements in projection exposure apparatusesMUEHLBERGER NORBERT·Filed 2011·Granted Oct 7, 2014·1 cites·20 claims
- 2160US9195145B2Microlithographic imaging optical system including multiple mirrorsZEISS CARL SMT GMBH·Filed 2014·Granted Nov 24, 2015·0 cites·37 claims
- 2258US9513562B2Projection exposure apparatus for microlithography for the production of semiconductor componentsZEISS CARL SMT GMBH·Filed 2014·Granted Dec 6, 2016·0 cites·29 claims
- 2357US9766550B2Actuators and microlithography projection exposure systems and methods using the sameZEISS CARL SMT GMBH·Filed 2015·Granted Sep 19, 2017·0 cites·23 claims
- 2456US9217936B2Optical device having a deformable optical elementSTEINBACH MANFRED·Filed 2011·Granted Dec 22, 2015·1 cites·29 claims
- 2556US7920344B2Arrangement for mounting an optical elementZEISS CARL SMT GMBH·Filed 2009·Granted Apr 5, 2011·2 cites·22 claims
- 2655US2018120710A1Optical device having a deformable optical elementZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 2754US9798243B2Optical device having a deformable optical elementZEISS CARL SMT GMBH·Filed 2015·Granted Oct 24, 2017·0 cites·18 claims
- 2853US7564636B2Device for preventing the displacement of an optical elementZEISS CARL SMT AG·Filed 2004·Granted Jul 21, 2009·5 cites·34 claims
- 2952US2012147344A1Actuators and microlithography projection exposure systems and methods using the sameWEBER ULRICH·Filed 2012·Application pending·0 cites
- 3052US2015138520A1Holding Device for an Optical Element in an ObjectiveASML NETHERLANDS BV·Filed 2014·Application pending·0 cites
- 3152US2008100930A1Optical measuring system, and a projection objectiveZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 3251US2011128521A1Actuators and microlithography projection exposure systems and methods using the sameZEISS CARL SMT GMBH·Filed 2011·Application pending·0 cites
- 3350US2008278828A1Optical ElementZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 3448US2008144199A1Arrangement for mounting an optical componentZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 3545US8542346B2Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrationsLIMBACH GUIDO·Filed 2009·Granted Sep 24, 2013·0 cites·33 claims
- 3645US2010128367A1Projection objective for a microlithography apparatus and methodZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 3745US2009219497A1Optical device with stiff housingZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 3844US7551375B2Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assemblyZEISS CARL SMT AG·Filed 2006·Granted Jun 23, 2009·0 cites·27 claims
- 3941US2004257675A1Optical measuring system, and a projection objectiveZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
- 4040US2009207511A1Assembly for adjusting an optical elementZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 4139US2004257681A1Bearing arrangement comprising an optical element and a mountZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
- 4238US8456615B2Optical system having heat dissipation arrangementHOLDERER HUBERT·Filed 2010·Granted Jun 4, 2013·0 cites·28 claims
- 4337US8854602B2Holding device for an optical element in an objectiveGELLRICH BERNHARD·Filed 2004·Granted Oct 7, 2014·1 cites·81 claims
- 4435US2006126195A1Device for receiving an optical module in an imaging unitRAU JOHANNES·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →