Inventor · disambiguated record
Arun Thottappayil
Also filed as: THOTTAPPAYIL ARUN
1 granted patent·4 pending applications·0 citations·filing 2020–2025
4Inventor score
Top patents by PatentIndex Score
5 records- 0160US2025372352A1Reaction chamber with temperature control capabilities and substrate processing system equipped with the sameASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0257US2024124981A1Gas inlet tube assembly for an improved gas mixture in a substrate processing apparatusASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0342US2022122811A1Electric arc mitigating faceplateAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 0438US12020907B2Faceplate with localized flow controlAPPLIED MATERIALS INC·Filed 2020·Granted Jun 25, 2024·0 cites·18 claims
- 0537US2023411176A1Reaction chamber for processing semiconductor substrates with gas flow control capabilityASM IP HOLDING BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →