Inventor · disambiguated record
Ashur J. Atanos
Also filed as: ATANOS ASHUR J
9 granted patents·16 pending applications·122 citations·filing 1999–2025
82Inventor score
Top patents by PatentIndex Score
25 records- 0189US6342691B1Apparatus and method for thermal processing of semiconductor substratesMATTSON TECH INC·Filed 1999·Granted Jan 29, 2002·111 cites·35 claims
- 0285US9957431B2Composite material, heat-absorbing component, and method for producing the composite materialSCHEICH GERRIT·Filed 2013·Granted May 1, 2018·11 cites·20 claims
- 0384US2025320628A1Epi isolation plate and parallel block purge flow tuning for growth rate and uniformityAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0484US2025323027A1Process kits and related methods for processing chambers to facilitate deposition process adjustabilityAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0580US2024254655A1Epi isolation plate and parallel block purge flow tuning for growth rate and uniformityAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0676US12456614B2Process kits and related methods for processing chambers to facilitate deposition process adjustabilityAPPLIED MATERIALS INC·Filed 2022·Granted Oct 28, 2025·0 cites·20 claims
- 0775US12354855B2Process kits and related methods for processing chambers to facilitate deposition process adjustabilityAPPLIED MATERIALS INC·Filed 2022·Granted Jul 8, 2025·0 cites·19 claims
- 0874US2025146173A1Epi isolation plate and parallel block purge flow tuning for growth rate and uniformityAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0963US2025129509A1Auxiliary flow plate for thickness and concentration uniformity adjustabilityAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1062US12243761B2Detection and analysis of substrate support and pre-heat ring in a process chamber via imagingAPPLIED MATERIALS INC·Filed 2022·Granted Mar 4, 2025·0 cites·19 claims
- 1160US12270752B2EPI self-heating sensor tube as in-situ growth rate sensorAPPLIED MATERIALS INC·Filed 2022·Granted Apr 8, 2025·0 cites·20 claims
- 1260US2025003806A1Chamber kits, systems, and methods for calibrating temperature sensors for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1359US12221696B2Process kits and related methods for processing chambers to facilitate deposition process adjustabilityAPPLIED MATERIALS INC·Filed 2022·Granted Feb 11, 2025·0 cites·22 claims
- 1458US12417890B2Methods, systems, and apparatus for monitoring radiation output of lampsAPPLIED MATERIALS INC·Filed 2023·Granted Sep 16, 2025·0 cites·16 claims
- 1558US2024247404A1Pre-heat rings and processing chambers including black quartz, and related methodsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1658US2024363448A1Measuring systems, processing systems, and related apparatus and methods, including band gap materialsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1757US2024141487A1Epi overlapping disk and ringAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1854US2024145273A1Multi-wavelength pyrometer for chamber monitoringAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1953US2024337537A1Systems, apparatus, and methods for monitoring plate temperature for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2053US2024363327A1Epi thermal profile tuning with lamp radiation shieldsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2151US2024274448A1Transfer apparatus, and related components and methods, for transferring substratesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2250US2024170321A1Transfer apparatus, and related components and methods, for transferring substratesAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2349US2024035161A1Actively controlled pre-heat ring for process temperature controlAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2445US2018215984A1Composite material, heat-absorbing component, and method for producing the composite materialSCHEICH GERRIT·Filed 2018·Application pending·0 cites
- 2541US10604438B2Process for joining opaque fused quartz to clear fused quartzHERAEUS QUARTZ AMERICA LLC·Filed 2015·Granted Mar 31, 2020·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →