Inventor · disambiguated record
Aviv Balan
Also filed as: BALAN AVIV
10 granted patents·1 pending application·25 citations·filing 2007–2020
84Inventor score
Top patents by PatentIndex Score
11 records- 0184US7992877B2Non contact substrate chuckKLA TENCOR CORP·Filed 2007·Granted Aug 9, 2011·12 cites·6 claims
- 0280US11209373B2Six degree of freedom workpiece stageKLA CORP·Filed 2020·Granted Dec 28, 2021·1 cites·16 claims
- 0374US9529280B2Stage apparatus for semiconductor inspection and lithography systemsKLA TENCOR CORP·Filed 2014·Granted Dec 27, 2016·2 cites·19 claims
- 0473US8643835B2Active planar autofocusYOUNG SCOTT A·Filed 2010·Granted Feb 4, 2014·4 cites·6 claims
- 0570US8285418B2Dual scanning stageBALAN AVIV·Filed 2010·Granted Oct 9, 2012·3 cites·7 claims
- 0667US10083852B1Floating wafer chuckKLA TENCOR CORP·Filed 2017·Granted Sep 25, 2018·1 cites·14 claims
- 0765US10468288B2Methods and systems for chucking a warped waferKLA TENCOR CORP·Filed 2016·Granted Nov 5, 2019·2 cites·15 claims
- 0849US11637030B2Multi-stage, multi-zone substrate positioning systemsKLA CORP·Filed 2020·Granted Apr 25, 2023·0 cites·28 claims
- 0946US2009153824A1Multiple chuck scanning stageKLA TENCOR CORP·Filed 2007·Application pending·0 cites
- 1045US8924014B2Dual scanning stageBALAN AVIV·Filed 2012·Granted Dec 30, 2014·0 cites·7 claims
- 1137US11121019B2Slotted electrostatic chuckKLA TENCOR CORP·Filed 2018·Granted Sep 14, 2021·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →